INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual
Page 83
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STC-2000A DEPOSITION CONTROLLER
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This parameter is used to associate a specific sensor map to a specific film. When a film becomes
active, it will invoke the map number named by this parameter. The map itself is edited/changed within the
REVIEW SS MAP menu.
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Parameter
POCKET SELECT
Select Value; Range is 0 – 63
Units
Pockets
Pocket Select
This parameter is used to provide pocket information from a specific film in conjunction with the
ss map parameter: indexer sync mode. If indexer sync mode is set for either delay or feedback, then
following an XTAL verify, the indexer activity will commence before arriving at the RISE1 phase. Either a
1 of N or a binary (3 digit) value issued through output relays by I/O programming will select the correct
pocket. If indexer sync mode is set to none, then the POCKET SELECT parameter has no effect.
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Parameter
ETCHING MODE
Polarity Value: OFF/ON
Units
None
Etching Mode
This parameter sets the STC-2000A for either a deposit mode (positive rate) when set to OFF or
an etch mode (negative rate) when set to ON.
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SECTION 3.XX
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