INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 10)

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STC-2000A DEPOSITION CONTROLLER
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SECTION 1.XX e page 10 of 292 ^
I/O Programming Introduction .......................................................................................................... 156
S ECTION 5.2 ............................................................................................................................................ 160
Boolean Definitions ............................................................................................................................ 160
S ECTION 5.3 ............................................................................................................................................ 161
States And Events ............................................................................................................................... 161
S ECTION 5.4 ............................................................................................................................................ 166
Steady State vs. Edges ........................................................................................................................ 166
S ECTION 5.5 ............................................................................................................................................ 166
Input Functions................................................................................................................................... 166
S ECTION 5.6 ............................................................................................................................................ 167
Output Functions ................................................................................................................................ 167
S ECTION 5.7 ............................................................................................................................................ 167
Softnodes And Sync Events ................................................................................................................. 167
S ECTION 5.8 ............................................................................................................................................ 168
Internal Operations ............................................................................................................................ 168
S ECTION 5.9 ............................................................................................................................................ 169
Operate Menu..................................................................................................................................... 169
S ECTION 5.10 .......................................................................................................................................... 169
Memory Menu..................................................................................................................................... 169
S ECTION 5.11 .......................................................................................................................................... 170
Editing An I/O Program ..................................................................................................................... 170
I/O Programming Tree ....................................................................................................................... 172
S ECTION 5.12 .......................................................................................................................................... 175
I/O Setup Edit Menu ........................................................................................................................... 175
S ECTION 5.13 .......................................................................................................................................... 176
Edit/Change Menu.............................................................................................................................. 176
COMPUTER INTERFACING [6.XX] .................................................................................................. 198
S ECTION 6.0 ............................................................................................................................................ 198
Host Port Interface ............................................................................................................................. 198
THEORY AND CALIBRATION [7.XX] .............................................................................................. 266
S ECTION 7.0 M EASUREMENT T HEORY .................................................................................................... 266
Equation 1 .......................................................................................................................................... 266
S ECTION 7.1 C ALIBRATION ..................................................................................................................... 267
Thickness ............................................................................................................................................ 267
Density Determination....................................................................................................................... 267
Z-Factor Determination ..................................................................................................................... 267
Tooling Dtermination ......................................................................................................................... 267
Material Reference Table:.................................................................................................................. 269
Aluminum Through Indium............................................................................................................................. 269
Indium Intimonide Through Terium ................................................................................................................ 270
Thallium Through Zirconium Oxide................................................................................................................ 271
MAINTENANCE/PROBLEM SOLUTIONS [8.XX]........................................................................... 272
S ECTION 8.0 ............................................................................................................................................ 272
Warnings/Cautions ............................................................................................................................. 272
User Correctable System Problems.................................................................................................... 272
S ECTION 8.1 R EPLACING A S ENSOR C RYSTAL ....................................................................................... 274
Cautions/Procedural Steps ................................................................................................................. 274
S ECTION 8.2 P ERSISTENT C RYSTAL F AIL I NDICATION ........................................................................ 274
Discussion .......................................................................................................................................... 274
Hardware Issues................................................................................................................................. 275
S ECTION 8.3 FAQ S ................................................................................................................................ 276
S ECTION 8.4 S YSTEM B ATTERY A ND M EMORY C ONSIDERATIONS ..................................................... 276
Procedure to Change Battery ............................................................................................................. 276