INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual
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STC-2000A DEPOSITION CONTROLLER
y
N.A.
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Parameter 34
N.A.
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Parameter 35
N.A.
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Parameter 36
N.A.
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Parameter 37
N.A.
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Parameter 38
N.A.
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Parameter 39
access: AMAPID active map, contains 1..10 indicating current active map.
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Parameter 40
access: IO_SCALAR_ANALOG, numeric value 0..255 which controls a chart recorder analog output value
0..FullScale if chart recorder option set to IOACC control mode.
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Parameter 41
access: LFOVER, xtal life over limit bit map, bits set for xtal channels which are giving valid readings for
which the life value is less than the limit value in the active film program.
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Parameter 42
access: ZPWRS, bit map of which sources are at 0 power or unused, 1 if source has power or is strip-chart
recorder usage.
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Parameter 43
access: XTLAVAIL, bit map in pairs, shows what modules are avail.
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Parameter 44
access: IO1_MODSTS I/O slot 1 module status.
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Parameter 45
access: IO2_MODSTS I/O slot 2 module status.
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Parameter 46
access: IO3_MODSTS I/O slot 3 module status.
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Parameter 47
access: IO4_MODSTS I/O slot 4 module status.
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Parameter 48
access: XTLDEADMAP Bitmap, sensors detected as dead.
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Parameter 49
access: XTLSBYMAP Bitmap, sensors in standby.
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Parameter 50
access: XTLUSMAP Bitmap, sensors in use contributing.
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Parameter 51
SECTION 6.XX
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