INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 287)

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STC-2000A DEPOSITION CONTROLLER
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INDEX
1
1 st STATUS screen...........................................56
2
2 nd STATUS screen..........................................56
A
Analog output
D-SUB connections ....................................146
B
Battery
description, replacement, effect on clock
memory, hazards.....................................273
system config, effect on clock ......................44
C
Checksum
FILM parameters ..........................................72
host port communication command, I/O
programming ..........................................245
host port communication command, parameter
status.......................................................227
host port communication commands, I/O
program editing ..............................247, 249
host port communication commands, product
firmware .................................................201
host port communications error recovery ...197
host port communications protocol ....196, 197
I/O programming ........154, 167, 182, 183, 185
I/O programming overview ....................50, 52
I/O programming, A/B memory change .....184
I/O programming, factory installed ............186
parameter validation ...................................120
parameters after purge/factory restore ........121
PROCESS parameters ..................................90
PROCESS programming ............................130
product software .........................................119
quick index .................................................282
E
error
bus hold, process, Event/State ID ...............160
clear to select active process.........................66
codes , OPT/INF.........................................119
edge event, I/O programming .....................164
event, I/O programming .............................165
I/O messages, causes ..................................193
in I/O programming................................47, 49
in recipe, FILM abort ...................................64
in Z-Factor, thickness ................................ 115
inhibited message ........................................ 25
inhibited, set active process ......................... 98
initial, abnormal stop ................................... 59
input, I/O programming ............................. 164
L/Q, loop deviation.................................... 115
list of codes, I/O......................................... 247
memory module......................................... 123
non-seq, inhibited ........................................ 99
non-seq/seq mode differences.................... 100
OUT, I/O programming ............................. 176
PID, rate control ........................................ 105
process edit, in recipe .................................. 87
process, reset................................................ 88
response format, communications ............. 199
Review FILM, range.................................... 70
RS-232 communication ............................. 197
rung 007, 008, I/O program ....................... 187
stack balance, I/O programming................ 167
START process diagram............................ 134
system, process ............................................ 86
token string, I/O programming .................. 174
where displayed, recovery select ................. 64
xtal stab, instantaneous rate ....................... 113
xtal switch.................................................. 114
Z-Factor ..................................................... 264
I
Input card
connection hazards .................................... 269
described in factory I/O program............... 186
described in host port communication
parameters.............................................. 215
described in I/O program ................... 183, 185
described in I/O program example............. 191
described in I/O program for 4 pocket source
............................................................... 191
description, card options & pin connections
............................................................... 148
host port communications, status commands
............................................................... 239
I/O function elements .................................. 18
I/O programming control overview ............. 46
I/O programming errors............................. 193
I/O programming, function not limited to...164
I/O programming, scanning tokens............ 166
I/O programming, used with arithmetic/logical
functions ................................................ 177
installation, shielding................................. 144
installation/removal ..................................... 38
jumpers .............................................. 148, 150
no need to interconnect relays to inputs..... 155
SECTION 11.XX page 287 of 292