INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 133)

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STC-2000A DEPOSITION CONTROLLER
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This program for Film 1 will tell the STC-2000A to use a single rise cycle to 15% power over a
one minute period, soak at that power for 10 seconds prior to deposition with a desired rate of 20.0Å/s.
Editing Film Parameters
For a real deposition process you would have to concern yourself about more of the parameters
than the list above. Parameters such as Density and P-I-D control loop values would have to be set to match
the deposition material and source characteristics.
For our test example, the first parameter that we want to change is the SOAK 1 PWR VALUE. Press
down (or up) arrow repeatedly until this parameter appears on the displayed section of the parameter list
and the cursor points to it. Press the edit (EDT) key and this parameter will appear by itself along with its
current value, unit value name, and value range.
If password is set to a non-zero value, an intermediate password entry screen will appear (see sections: 2.5
[end], 2.6 factory settings, 2.14 PASSWORD LOCK#).
Next, press the change (CHG) key and numeric keys appear to enter the desired value. Please note decimal
point location and numerically represented translations in the edit area. Enter the 1, 5 and the 0 so that they
have assumed their appropriate digit positions. The digits represent a temporary workspace that is saved
only when the enter (ENT) key pressed. In the temporary workspace, leading zeroes are suppressed but the
range information specifies the upper limit. Pressing the enter (ENT) key accepts the new parameter into
the parameter list, the numeric keys are then removed and the previous keys are returned.
During the parameter value entry, a clear (CLR) key appears and can be used to restore the original value.
Pressing the BAK key during the parameter entry also restores the original value (discarding the edit) and
in addition restores the previous screen.
Once a parameter is entered, you can scroll to the next parameter on the edit menu (individual parameters
are shown per each screen at this menu level) or return to the main REVIEW FILM menu and scroll
through the list with 6 parameters displayed at a time (when the parameters are relatively far apart on the
list). After the edit/change is entered, move on to the next parameter that needs to be programmed using
UP/DOWN arrow keys.
With the SOAK 1 PWR VALUE entered, proceed to the PWR RAMP 1 TIME. Please note
colon location. Program this parameter to 1:00. Next program PWR SOAK 1 TIME to 0:10. This
completes the pre-deposit parameters.
Now we must go to the DEPOSIT RATE parameter and set it to 20.0 Å/s It is several
parameters down the screen. The next parameter to program is MAX POWER LIMIT which is several
parameters further down the list. Set it to 100.0%. The last one to program is near the bottom of the list,
which is PLOT VERT SCaLe V. This parameter is different from the others that have been programmed
in the sense that the values are not in a continuous range but are a set of specific values {1, 5, 10, 50, 100}.
Selection of these values, although numeric, is not made directly but by selecting numbers that represent
them. Think of them as being on a list and you select them by their position on the list. Entering digits that
do not equal one of these values will be error trapped in software and cause an error message to appear on
the bottom line: ERROR: VALUE OUT OF RANGE. The value we want this parameter to be is ±10
Angstroms deviation, so we press the appropriate digit key (3 not 10), then press ENTer to accept this
value. The numeric keys will disappear and the parameter value of 10 will be displayed in the text area
when you do this. This completes the programming of Film 1.
Selecting Different Film to Edit
Changing Edit Film
The second film we are using in our test example is Film 3. To program or change a film (1 of 9
Films), it must first be selected to be the edited Film. There are two ways to accomplish this (continuing
from above menu location): 1) Push the fixed STATUS key. This will cause a return to the Run Time
screen from which a press of the fixed MENU key will produce the main MENU screen. On the main
MENU, press the digit associated with the REVIEW FILM key such that 3 is entered, then press the
REVIEW FILM key. 2) Push the F# key. This will cause a numeric entry menu to appear. Press the 3
key.
In either case, the 3
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Film list is selected and a new edit Film process can begin. The fact that you
are now editing Film 3 is displayed on the second line of the screen after the path information.
SECTION 3.XX page 133 of 292