INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 237)

p
STC-2000A DEPOSITION CONTROLLER
y
Deposition is at Desired Rate. If this parameter is TRUE the measured rate is equal to the desired rate, else
(0) not at desired rate.
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Parameter 23
Allow Zeroing
Value Range 0, 1
Units False, True
Zeroing allowed when entering deposit. If this parameter is true (1) then Zeroing is inhibited on entering a
deposit, else it is allowed [default].
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Parameter 24
Crystal Test Mode
Value Range 0, 1
Units 0 normal (need both working), 1 limp along on 1 crystal.
Normally, a unit configured for dual sensor operation requires both channels to be valid at the start of a
deposition. In a multi-film deposition, it is possible to have a crystal failure on one of the channels after
successfully finishing several initial layers. By disabling the need for both channels to be valid in later
layers, the process can continue automatically with only one remaining crystal.
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Command Examples
Command G1=1
Response A
Description
Set status parameter 1 (soak hold status) to 1 or true. This will cause the process sequence
to hold at the end of soak 2 and wait for the soak hold status to become false. Command understood and
accepted.
Table 6.9: More Group 5 Examples.
Group 6-- Read, Trigger Events
Commands H & I
(H,I) Event Commands. These commands read and force certain conditions to occur in the STC-
2000A. When setting an event, only the parameter number is needed. There is no data associated
with the parameter. (See Table 6.15)
Event Commands (H,I)
These commands are used to poll and trigger certain events in the STC-2000A. When polling, a
value of 0 or 1 is returned indicating not occurred or occurred. The poll status is latching, that is if an event
happens, its poll status remains until read by the computer interface. It is then reset and waiting to be set by
that event again.
When triggering an event, no value is required since the action of sending the parameter triggers the event.
The following is a Table showing parameter numbers and their equivalent I/O events:
List of computer pollable event codes:
Parameter# Mnemonic I/O ID# Description
1 STOP Any stop event, internal or external.
2 START Any simple start event, internal or external.
3 STARTG General start event, either I/O or computer.
4 START1 Select & Start Film 1, generated via I/O,COMM in non-
sequencing option unit, or via sequence logic in sequencing-
Read, Trigger Events
SECTION 6.XX page 237 of 292