INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual
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STC-2000A DEPOSITION CONTROLLER
y
[RZCD_AOK] if proper process, step and film numbers were sent.
[RZCD_ILCD] if unit is non-sequencing instrument.
[RZCD_ILDV] if improper value for parameter arguments.
[RZCD_ILSN] if too many arguments, wrong delimiters, etc..
[RZCD_INHB] if the requested step number is beyond the last valid step in the program or the
instrument is running a process and the selected process is the active process and the step
being alterred is the current active layer step. Programming the film for steps other than
the current active step is valid and allowed.
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Command: c
Mnemonic: EXCT_prthik
(Process read thickness)
Parameters:
[PROCID] [STEPID] where PROCID is 1..9 and STEPID is step selector 1..99.
Description:
Request a readback of a process step's final thickness limit value setting. Returns a
numeric value (0-9999999 angstroms) for the current setting of the target process step.
Returns:
[RZCD_AOK][thik_value] if proper process and step #s were sent.
[RZCD_ILCD] if unit is non-sequencing instrument.
[RZCD_ILDV] if improper value for parameter arguments.
[RZCD_ILSN] if too many arguments, wrong delimiters, etc..
[RZCD_INHB] if step number not valid in specific process program.
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Command: d
Mnemonic:
EXCT_pwthik (Process write thickness)
Parameters:
[PROCID] [STEPID] [assign_delim] [THIK_VAL] where
PROCID identifies target process,
STEPID identifies target step within process,
THIK_VAL specifies new final thickness value 0..999999 angstroms for step.
Description: Commands STC to set process step's thickness limit to new value.
Returns:
[RZCD_AOK] if proper process, step and thickness numbers were sent.
[RZCD_ILCD] if unit is non-sequencing instrument.
[RZCD_ILDV] if improper value for parameter arguments.
[RZCD_ILSN] if too many arguments, wrong delimiters, etc..
[RZCD_INHB] if the requested step number is beyond the last valid step in the program. It is
always legal to change the final thickness value in the recipe, even when the program is
running the targeted process step layer.
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Command Examples
Command W2
57
Response L
Description
Command to erase step 57 of process 2 is invalid because no such step exists, or process
is currently active.
Command W1
13
Response A
Description
Command to erase step 13 of process 1 is successful.
Command X1
89=1
Response A
Description
Command to insert a step in a process has succeeded. Any step which were already at or
after the 89
th
step have been renumbered so as to follow step 89. If the last preexisting step was less than
SECTION 6.XX
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