INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual
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STC-2000A DEPOSITION CONTROLLER
y
Figure- 3.18: Six Layer Test Process.
After programming the above process, note the five digit number that appears in the upper right
area of the screen labeled ID (a checksum for the seven step process sequence). This is a unique checksum
determined by the numbers and terms programmed into the process. If you have programmed the process
identical to the above example the checksum number will be 44943. After programming an actual process,
it is useful to record this number. If you ever have to duplicate a process program all of the data entry can
be verified by comparing this number to original process checksum. See section 2.21: check sum
validation.
Feel free to repeat the above procedural elements with variations that still complete the desired goal as
many alternative paths are possible.
Programming Film 1 & Film 3
Film Programming
To complete the programming of Process 1, both Film 1 and Film 3 need to have proper material
and source parameters. To edit or review a film program push the fixed MENU key from the Run Time
screen to bring up the Main Menu. Press the digit associated with and to the right of the REVIEW FILM
key. The digit entry represents the FILM#. Next, press the REVIEW FILM key to select the FILM # to
review/edit as identified by the digit entry. At this point, you will see a display similar to Figure 3.18. The
current parameter will probably be different as the last parameter edited is 'remembered' by the STC-2000A
and this is what will be shown on your display. If the edit film is not Film 1 at this point, pushing the F#
key will allow selection of the Film # as the desired film program to be edited. Pushing the fixed STATUS
key returns you to the RunTime screen.
There are several parameters on each film that need to be programmed in order to do a sample test
run. For Film 1 the parameters that we will change are :
SOAK 1 PWR VALUE to
15.0 %
PWR RAMP 1 TIME
to
1:00
PWR SOAK 1 TIME
to
0:10
DEPOSIT RATE
to
20.0 A/s
MAX PWR LIM
to
100.0%
PLOT VERT SCL V
to
10
SECTION 3.XX
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