INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 289)

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STC-2000A DEPOSITION CONTROLLER
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SECTION 11.XX page 289 of 292
S
SOAK
copy FILM parameter list ...........................287
host communications, phase status .............226
host port communications...........................205
I/O program table .......................................160
on FILM parameter list.................................16
on FILM parameter list after purge ..............44
overview .................................................31, 42
power soak time............................................76
run cycle phase ...........................................106
soak power....................................................76
Source control voltage
D-SUB connections ....................................146
Source power
control voltage output overview ...................26
Source Sensor card
analog control voltage connections ............145
D-SUB connections ....................................146
effect of zero thickness on value.................. 17
overview ...................................................... 26
physical location .......................................... 39
programmable parameters ........................... 18
programming dependencies ......................... 20
recorder function/output .............................. 17
status on options/info screen...................... 119
Specifications
Product......................................................... 15
T
test mode
Running Process Simulation. 5, 25, 28, 40, 41,
46, 52, 67, 127, 133, 274
Z
Zero key
description ................................................... 61