Stc-2000a deposition controller – INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual
Page 61
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STC-2000A DEPOSITION CONTROLLER
y
Flow chart depicting the steps of a START process.
VERIFY
XTAL
WAIT
CHECK
BUSY
Proc
ERROR
REST
STOP
1
st
RESET/START
PROC
2
nd
RESET/START PROC
3
rd
RESET/START PROC
LAYER = #
First press of START key + RESET/START PROC key:
to REST location.
Second press of START key + RESET/START PROC key:
to STOP location.
Third press of START key + RESET/START PROC key: to VERIFY CRYSTAL location.
This sequence was presented to help provide an understanding of a start. Other sequences are possible.
SECTION 3.XX
page 61 of 292
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