INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 231)

p
STC-2000A DEPOSITION CONTROLLER
y
4 Process Accounting Error
8 Process Sequence
The values are added together to form a composite error number. A returned value of 5 would indicate that
there was a film parameter error and a process accounting error. This is a read only parameter.
access: VMEMS volatile memory status, bit weight composite which indicates which memory regions
have a failed checksum.
0 VMEMS_aok All good is 0.
1 VMEMS_fpms Film params defaulted.
2 VMEMS_iopg IO program defaulted to empty.
4 VMEMS_pact Process accounting region data lost.
8 VMEMS_sequ Process sequence region data lost.
______________________________________________________________________
Parameter 14
Hand Power Pendant INC Button
Value Range 0,1
Units False, True
This parameter is true while the INC button on the hand power pendant is pressed. This is a read only
parameter.
access: PNDUP pendant up power button pushed status, true (1) when pushed.
______________________________________________________________________
Parameter 15
Hand Power Pendant DEC Button
Value Range 0,1
Units False, True
This parameter is true while the DEC button on the hand power pendant is pressed. This is a read only
parameter.
access: PNDWN pendant down power button pushed status, true (1) when pushed.
______________________________________________________________________
Parameter 16
Hand Power Pendant Stop Button
Value Range 0,1
Units False, True
This parameter is true while the STOP button on the hand power pendant is pressed. This is a read only
parameter.
access: PNDSP pendant stop button pushed status, true (1) when pushed.
______________________________________________________________________
Parameter 17
Film Hold
Value Range 0,1
Units False, True
If this parameter is true prior to start of film, film will remain in crystal verify phase until this parameter is
false. Settable via RS232or I/O Logic. This is a read only parameter.
access: FLMHLD film hold, program will stop at FHOLD state when started if this status was true(1).
Requires an event trigger to break out of film hold (RLSFHLD event).
______________________________________________________________________
Parameter 18
Active Layer
Value Range 0...99
Units Process Layer
This parameter reports the active layer as displayed on the screen. If sequence is reset and "#" is displayed
on the screen, this parameter is "0". This is a read only parameter.
access: PROCIP process in process. 0 if # on screen, is layer step # if not. Valid range 0..99.
______________________________________________________________________
SECTION 6.XX page 231 of 292