beautypg.com

INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual

Page 218

background image

p

STC-2000A DEPOSITION CONTROLLER

y

______________________________________________________________________

Parameter 18

NA

access value: OBSO Was ieee-488 address.

______________________________________________________________________

Parameter 19

NA

access value: OBSO Was bit bus address.

______________________________________________________________________

Parameter 20

NA

access value: OBSO Was gpib checksum control param code.

______________________________________________________________________

Parameter 21

NA

access value: OBSO Was line frequency param code.

______________________________________________________________________

Parameter 22

Sequence Inhibit

Inhibit Sequence Mode

access value:

SQINH sequence inhibit, set true when cant sequence, Needs reset.

Value Range

0,1

Units

None

This parameter (when set to 1) allows a STC-2000A to operate like a non SQ. This can be polled/set via
RS232 or changed on the SERVICE menu (see Section 2).
______________________________________________________________________

Parameter 23

Recorder Out Channel

access value:

ROUTS Analog output channel select, when ARFNC not off, then active datalogging
value output to analog channel 1 or 2 providing no conflict with process control.

Units

None

1 – 2 selects an analog output channel for use

(if not off and not used as a source)

______________________________________________________________________

Parameter 24

N.A.

______________________________________________________________________

Parameter 25

N.A.

______________________________________________________________________

Parameter 26

N.A.

______________________________________________________________________

Parameter 27

N.A.

______________________________________________________________________

Parameter 28

I/O Slot 1 Type

access value:

REQIO1 Require Input/Output 1 in system, CFGIOS_class DSBL/Inp/Outp

Value Range

UNUSED (DISABLED) / INPUT / OUTPUT

Units

None

______________________________________________________________________

Parameter 29

I/O Slot 2 Type

access value:

REQIO2 Require Input/Output 2 in system, CFGIOS_class

Value Range

UNUSED (DISABLED) / INPUT / OUTPUT

Units

None

______________________________________________________________________

Parameter 30

I/O Slot 3 Type

access value:

REQIO3 Require Input/Output 3 in system, CFGIOS_class

Value Range

UNUSED (DISABLED) / INPUT / OUTPUT

SECTION 6.XX

page 218 of 292