INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual
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STC-2000A DEPOSITION CONTROLLER
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Parameter 18
NA
access value: OBSO Was ieee-488 address.
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Parameter 19
NA
access value: OBSO Was bit bus address.
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Parameter 20
NA
access value: OBSO Was gpib checksum control param code.
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Parameter 21
NA
access value: OBSO Was line frequency param code.
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Parameter 22
Sequence Inhibit
Inhibit Sequence Mode
access value:
SQINH sequence inhibit, set true when cant sequence, Needs reset.
Value Range
0,1
Units
None
This parameter (when set to 1) allows a STC-2000A to operate like a non SQ. This can be polled/set via
RS232 or changed on the SERVICE menu (see Section 2).
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Parameter 23
Recorder Out Channel
access value:
ROUTS Analog output channel select, when ARFNC not off, then active datalogging
value output to analog channel 1 or 2 providing no conflict with process control.
Units
None
1 – 2 selects an analog output channel for use
(if not off and not used as a source)
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Parameter 24
N.A.
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Parameter 25
N.A.
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Parameter 26
N.A.
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Parameter 27
N.A.
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Parameter 28
I/O Slot 1 Type
access value:
REQIO1 Require Input/Output 1 in system, CFGIOS_class DSBL/Inp/Outp
Value Range
UNUSED (DISABLED) / INPUT / OUTPUT
Units
None
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Parameter 29
I/O Slot 2 Type
access value:
REQIO2 Require Input/Output 2 in system, CFGIOS_class
Value Range
UNUSED (DISABLED) / INPUT / OUTPUT
Units
None
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Parameter 30
I/O Slot 3 Type
access value:
REQIO3 Require Input/Output 3 in system, CFGIOS_class
Value Range
UNUSED (DISABLED) / INPUT / OUTPUT
SECTION 6.XX
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