INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 207)

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STC-2000A DEPOSITION CONTROLLER
y
[RZCD_ILDV] (H or I) if film #, parameter #, or new value is of improper value.
[RZCD_ILSN] if too many arguments, wrong delimiters, etc..
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Film parameter access values:
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Parameter 1 Density
access: DENS
Value Range 0.40 - 99.99
Units gm/cc
Reads Or Sets The Density Parameter depending which prefix letter A or B is used.
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Parameter 2 Z Factor
access: ZRAT io
Value Range 0.100 - 9.999
Units None
Reads Or Sets The Z Factor Parameter depending which prefix letter A or B is used.
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(Obsolete)
Parameter 3 Tooling Xtal 1
access: OBSOLETE Was sensor 1 tool
Value Range 10.0 - 400.0
Units Percent
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(Obsolete)
Parameter 4 Tooling Xtal 2
access: OBSOLETE Was sensor 2 tool
Value Range 10.0 - 400.0
Units Percent
Reads or sets depending which prefix letter A or B is used, the tooling factor parameters.
These correspond to the two sensors available on the STC-2000A.
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(Obsolete)
Parameter 5 Start Xtal #
access: OBSOLETE Was initial channel
Value Range 0,1
Units 0 is Sensor 1, 1 is Sensor 2
This indicates which of the 2 sensor crystals will be used for a deposition run.
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Parameter 6 Setpoint Thk Lim
access: STHK Setpoint Thickness Limit
Value Range 0.000 - 999.999
Units Kilo Angstroms
The setpoint thickness parameter is used to provide a comparison point for the STC-
2000A thickness setpoint event. This event will be triggered whenever the thickness
display equals or exceeds the setpoint value.
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(non-sequencing
mode only)
Parameter 7 Final Thickness Limit (Trigger)
access: FTHK final thickness, end of run trigger
Value Range 0.000 - 999.999
Units Kilo Angstroms
SECTION 6.XX page 207 of 292