INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual
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STC-2000A DEPOSITION CONTROLLER
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The ‘d’ commands the STC-2000A to set a process step’s thickness limit to a new value.
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Command: W
Mnemonic:
EXCT_perase (Process erase)
Parameters:
[PROCID] [STEPID] with PROCID ranging from 1..9 to select the recipe to alter.
STEPID ranging from 1..99 selecting the step to delete.
Description:
Request that the designated step of the selected process be erased, and any steps
following will be compacted up.
Returns:
[RZCD_AOK] if proper recipe # and step # sent and able to delete the step.
[RZCD_ILCD] if unit is non-sequencing instrument.
[RZCD_ILDV] if improper value for parameter arguments.
[RZCD_ILSN] if too many arguments, wrong delimiters, etc..
[RZCD_INHB] if the requested step number is beyond the last valid step in the program or the
instrument is running a process and the selected process is the active process.
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Command: X
Mnemonic:
EXCT_pinsrt (Process insert)
Parameters:
[PROCID] [STEPID] [assign_delim] [MODE_TYPE]
Description:
Commands STC-2000A to insert a new step into recipe, with the mode type as specified.
Defaults the new step's film number to 1, and the final thickness limit to 0 Angstroms.
After insertion of new step the film and thickness values can be changed with the
EXCT_pwfilm & EXCT_pwthik commands. PROCID ranges 1..9 to select the process to
insert the new step into. STEPID ranges from 1..99 and if exceeds the current length of
the process will interpret to add a new step at the end.
List of the Valid modes for a step.
1 MODE_auto Auto-start, this step will run at end of previous automatically.
2 MODE_wait Wait at this step for a process.
3 MODE_skip Skip this step and advance to others, if any, also used for insert.
4 MODE_stop Stop the process run, prepare to reset again.
Returns:
[RZCD_AOK] if proper process, step and mode numbers were sent.
[RZCD_ILCD] if unit is non-sequencing instrument.
[RZCD_ILDV] if improper value for parameter arguments.
[RZCD_ILSN] if too many arguments, wrong delimiters, etc..
[RZCD_INHB] if the instrument is running a process and the selected process is the active
process.
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Command: Y
Mnemonic:
EXCT_prmode (Process read mode)
Parameters:
[PROCID] [STEPID] where PROCID is 1..9 and STEPID is step selector 1..99.
Description:
Request a readback of a process step's mode setting. Returns a numeric value
corresponding to a mode per the chart below.
List of the Valid modes for a step readback.
0 MODE_end End of recipe, previous step last valid step.
1 MODE_auto Auto-start, this step will run at end of previous automatically.
2 MODE_wait Wait at this step for a process.
3 MODE_skip Skip this step and advance to others, if any, also used for insert.
4 MODE_stop Stop the process run, prepare to reset again.
Returns:
SECTION 6.XX
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