INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 74)

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STC-2000A DEPOSITION CONTROLLER
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The following reiterates information providing a starting place for parameter values when the STC-2000A
is received directly from the factory or the unit has had the memory purged or set to factory defaults.
Section3.3 describes the Service menu and memory configuration. Section 3.6 (end of next section) will
also discuss how memory is changed. While viewing the LCD screen, some parameters are not accessible
until other related parameters are in an appropriate state. These parameters are thus dependent upon the
condition of other parameters. A list of these dependent parameters is given along with their controlling
parameter (see section 1.7).
Film Parameter: Source Sensor Map Select
Source Sensor Map Select is a film parameter and as such a sensor map may be thought of as an extension
of the film parameters. Each film calls out a specific map. Many different films can reuse a single map.
Maps define many elements including the analog control output voltage and associated parameters, crystal
activity and associated parameters, sensor channel activity and associated parameters.
To Program a sensor map, start with the film parameter Source Sensor Map Select. Select the map number
that will be edited (or has been edited). Press ENTer to accept the value or BAcK to discard the enrty, if
any. This will select a map as the active map when the calling film is itself active and running. See section
2.1. The MAP# in use is shown on the Runtime screen along with the calling Film.
From the Main Menu, select the source sensor map named by the film parameter. This is initiated by
pressing the REVIEW S S MAP key. See section 1.8 for all Map parameters.
Result of pressing the Review SS MAP key
Result of pressing the EDiT key
To select a different map than the current map, press the GO2 MAP key. A numeric entry screen will appear that is
used to enter the needed map number to be edited. There are 10 maps available. Each map can profile a power supply.
Film
Parameter
Result of
pressing GO2
MAP key.
As was the case with Film parameters, there are
also Map parameters that are dependent upon other
parameters for accessibility. Note the "-" Prefix.
SECTION 3.XX page 74 of 292