INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 54)

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STC-2000A DEPOSITION CONTROLLER
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STC-2000A Front Panel
There are several areas of interest on the Front Panel. These are illustrated in Fig. 3.1.
Figure- 3.1: STC-2000A Front Panel and Key Descriptions
Fixed Keys and Software Controlled Keys (Touch Screen)
The
software controlled touch keys and the fixed MENU key are used for programming entries,
numeric and otherwise, and to navigate through the programming menus of the STC-2000A. When the
STC-2000A is initially turned on or generally when it is in operation, the display on the screen will be
similar to the display shown in Figure 3.2. This is called the RunTime screen. It shows most of the vital
parameters of the deposition process and is described
more fully in Section 2.3. When the fixed MENU
key is pressed the unit enters its programming menu tree. The touch keys select the menus and program the
parameters. When the RunTime screen is displayed, some touch keys are active such as the area
containing the text "L/Q". Pressing this area on the RunTime screen brings forth sequential text for the
various control loop quality factors (crystal stability modes) (see Section. 2.10). This allows selection of
the alternate modes (1-4). Forcing a sample, if crystal sample and hold is implemented, can also be selected
by pressing the text "SMPL" (see Section. 2.10). The area in figure 3.1 indicating the power% at 31.2 is
also a live area. Pressing this area changes through a sequence of observable parameters: RATE – A/S,
POWER% and THICK
NESS – KA. As the graph can be programmed to show: RATE, RATE
DEVIATION and POWER (a REVIEW FILM parameter), two parameters can be indicated simultaneously
(one graphically and one numerically) on the LCD display.
Fixed Keys: STOP, START, MANUAL, ZERO, MENU, STATUS
pendant jack
(manual mode)
LCD Display/Touch
Screen
Fixed USER programmable software
controlled keys (4) and yellow LED
indicators (4). Software control
is accomplished by user entered
I/O programming.
user programmable
LEDs (4 elements)
user
programmable
KEYs
(4 elements)
STC-2000A
MANUAL
ZERO
MENU
THICKNESS / RATE CONTROLLER
STATUS
START
HAND CONTROLLER
instruments
STOP
SECTION 3.XX page 54 of 292