INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 270)

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STC-2000A DEPOSITION CONTROLLER
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Material
Symbol Bulk Density Z Factor
gm/cc
Indium Intimonide
InSb 5.76 0.769
Indium Oxide In2O3 7.18 --------
Iridium Ir 22.4 0.129
Iron Fe 7.86 0.349
Lanthanum La 6.17 0.920
Lanthanum Fluoride LaF3 5.94 --------
Lanthanum Oxide LaO3 6.51 --------
Lead Pb 11.3 1.130
Lead Sulfide PbS 7.50 0.566
Lithium Li 0.53 5.900
Lithium Fluoride LiF 2.64 0.774
Magnesium Mg 1.74 1.610
Magnesium Fluoride MgF2 3.00 --------
Magnesium Oxide MgO 3.58 0.411
Manganese Mn 7.20 0.377
Manganese (II) Sulfide MnS 3.99 0.940
Mercury Hg 13.46 0.740
Indium Intimonide
Through Terbium
Molybdenum Mo 10.2 0.257
Neodynium Fluoride NdF3 6.506 --------
Neodynium Oxide Nd2O3 7.24 --------
Nickel Ni 8.91 0.331
Niobium Nb 8.57 0.493
Niobium (V) Oxide Nb2O5 4.47 --------
Palladium Pd 12.0 0.357
Platinum Pt 21.4 0.245
Potasium Chloride KCl 1.98 2.050
Rhenium Re 21.04 0.150
Rhodium Rh 12.41 0.210
Rubidium Rb 1.53 2.540
Samarium Sm 7.54 0.890
Scandium Sc 3.00 0.910
Selenium Se 4.82 0.864
Silicon Si 2.32 0.712
Silicon (II) Oxide SiO 2.13 0.870
Silicon Dioxide SiO2 2.20 1.070
Silver Ag 10.5 0.529
Silver Bromide AgBr 6.47 1.180
Silver Chloride AgCl 5.56 1.320
Sodium Na 0.97 4.800
Sodium Chloride NaCl 2.17 1.570
Sulfur S 2.07 2.290
Tantalum Ta 16.6 0.262
Tantalum (IV) Oxide Ta2O5 8.20 0.300
Tellurium Te 6.25 0.900
Terbium Tb 8.27 0.660
Table 7.1: Material Reference Table. Continued.
SECTION 7.XX page 270 of 292