INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 233)

p
STC-2000A DEPOSITION CONTROLLER
y
255 ALL sources overiden to zero power.
______________________________________________________________________
Parameter 22
At Rate ( Deposition is at Desired Rate)
Value Range 0, 1
Units False, True
This parameter is TRUE if the measured rate is equal to the desired rate, else (0) not at desired rate.
access: ATRATE Deposition was at rate, NOT (0), YES (1). Set by measurement once rate is > desired.
Only cleared in I/O program if used by customer. Better to use event code for ATRATE.
______________________________________________________________________
Parameter 23
Allow Zeroing
Value Range 0, 1
Units False, True
Check if Zeroing allowed when entering deposit. If this parameter is true (1) then Zeroing is inhibited on
entering a deposit.
access: ZERO Allow normal zeroing (0=ZERO_NORM) or inhibit it (1=ZERO_SKIP) when entering
deposit.
______________________________________________________________________
Parameter 24
Crystal Test Mode
Value Range 0, 1
Units False, True
If this parameter is true, a dual sensor configured STC-2000A will successfully start a film with only one
sensor operational (the limp along mode).
access: SCUP_SEES_UIFC Set true when UIFC detected.
______________________________________________________________________
Parameter 25
access: MEAS_DEAD Set true when measurement system fatal failure detected. This is a hardware
problem which is unrecoverable without recycling power and possibly repairing unit.
______________________________________________________________________
Parameter 26
access: UIF_DOGDIE Set true when UIFC dog times out and stop occurs.
______________________________________________________________________
Parameter 27
access: TEST_MODE Set true when the test/simulate mode is active.
______________________________________________________________________
Parameter 28
access: RTRSYNC Rotator Synchronization needed, 1 per source.
______________________________________________________________________
Parameter 29
access: ACTSRC Active source being controlled, 1..8.
______________________________________________________________________
Parameter 30
access: NON_SEQ Non-sequencing when true.
______________________________________________________________________
Parameter 31
access: SA1_POCKET source Channel 1 pocket, 0-63
______________________________________________________________________
Parameter 32
access: SA2_POCKET source Channel 2 pocket, 0-63
______________________________________________________________________
Parameter 33
SECTION 6.XX page 233 of 292