INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 228)

p
STC-2000A DEPOSITION CONTROLLER
y
This parameter is used to indicate that the STC-2000A is in a stopped state. The following returned values
are:
0 Stopped From A Power Up Condition
1 Stopped From A Crystal Bad Condition
2 Stopped From The I/O System Or Computer
3 Stopped From The Front Panel Key
4 Stopped From A Max. Power Condition
5 Stopped From The Hand Controller Button
6 Not Stopped
This is a read only parameter.
access: SMODE Stop mode, set when a stop event declared, set to one of the following STPCD_ types.
0 STPCD_CLEAN stopped at power up, no reason yet.
1 STPCD_GONE when stop condition cleared.
2 STPCD_XBAD crystal head or heads bad.
3 STPCD_RMOTE remote from I/O system.
4 STPCD_FPNL front panel.
5 STPCD_MAXP max power condition persisted too long.
6 STPCD_PEND remote pendant stop.
7 STPCD_UIFLST user interface presence lost.
8 STPCD_MEASCRIT
critical measurement failure, comm lost to S4 card required for usage per config.
9 STPCD_IOCRIT critical I/O failure, comm lost to I/O or a detectable/unrecoverable failure.
10 STPCD_BHIE_ERR Bus Hold Integrity error failure caused.
11 STPCD_INDEXER_FAIL Rotator failed to signal done in time.
12 STPCD_INVALID_SRC Invalid source programmed in recipe.
13 STPCD_INVALID_SNS Invalid sensor channel in recipe.
14 STPCD_IO_AX1 Auxiliary I/O stop 1.
15 STPCD_IO_AX2 Auxiliary I/O stop 2.
16 STPCD_IO_AX3 Auxiliary I/O stop 3.
17 STPCD_IO_AX4 Auxiliary I/O stop 4.
18 STPCD_QUALDLY Shutter delay quality failure
19 STPCD_QUALDEP Deposition quality failure.
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Parameter 6
Active Film Number
Value Range 1 To 50
Units Film Number
This parameter returns the current active film number. This is a read only parameter.
access: AFPN active film processing # 1..50.
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Parameter 7
Running A Process (Process Running Flag)
Value Range 0,1
Units False / True
This parameter indicates that a process is running. A returned value of 1 indicates that a process is running.
This is a read only parameter.
access: RNMD true when sequencer running a process, false(0)/true(1) false when at rest.
0 RNMD_FALSE
1 RNMD_TRUE
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Parameter 8
Substrate Shutter Status
Value Range 0,1
Units Closed, Open
This parameter indicates if the substrate shutter is open or closed. A returned value of 0 indicates that the
shutter is closed and a value of 1 indicates that it is open. This is a read only parameter.
SECTION 6.XX page 228 of 292