Electrical, Materials (in vac) – INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual
Page 22
p
STC-2000A DEPOSITION CONTROLLER
y
SECTION 1.XX
page 22 of 292
Electrical
Connections
................................................................ One Coaxial Line
Type
........................................................................... MicroDot Miniature
Materials
(in VAC)
Body and Water Lines ............................................... 304 Stainless
Insulators
.................................................................... Alumina
Coax
Insulator
............................................................ Teflon
Coax Conductor and Shields ...................................... Copper/Silver
Braze
Material ............................................................ High VAC Ni/CR/Cu Alloy
Crystal
Quartz
with
Gold
Electrodes
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