INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 282)

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STC-2000A DEPOSITION CONTROLLER
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see index keyword
programming summary: Fixed STATUS key
⇒ Fixed STATUS key ⇒ Fixed STATUS key ⇒ Fixed
STATUS key (starting with Runtime screen, shows 3 STATUS screens and returns to the Runtime screen).
2. b) description: During a deposition, selecting a different Crystal sensor is accomplished by failing the
current active crystal sensor channel and, having preset an alternate crystal channel as the backup,
automatically switch from one crystal sensor to an alternate. This process can be reversed by a re-verify.
Before a deposition, the active crystal channel and its potential backup channel are set using the Source
Sensor MAP menu.
purpose: Select a Crystal sensor for active use in the current process.
background/conceptual info: pages
detailed info: pages
see index keyword
programming summary: Fixed MENU key
⇒ REVIEW SS MAP key →
MINimum START XTALS
MINimum BACKUP XTALS
MINimum ACTIVE XTALS
Channel x START MODE
Channel x FAIL ACTION
Channel x BACKUP LIST
Fixed STATUS key
⇒ Fixed STATUS key ⇒ Fixed STATUS key ⇒ FORCE FAIL
(to fail crystal channel).
Fixed STATUS key
⇒ Fixed STATUS key ⇒ Fixed STATUS key ⇒ RE-VERIFY
(to reinstate a failed
working crystal channel).
[Note: pressing the fixed STATUS key 3 times, beginning at the runtime screen, produces the 3
rd STATUS screen.]
2. b1) description: The physical crystal Sensor connections involve electrical connections, mechanical
attachments, plumbing (air and water), wiring considerations, oscillator placement. Electrically, the crystal
sensor head is connected to the oscillator, which is in turn connected to the deposition control unit.
Specifically, the crystal is connected with a teflon wire to a feedthrough (with its connectors), then a length
of BNC terminated cable (keep short), the oscillator, another length of BNC terminated cable (up to 100
ft.), and finally to the deposition control unit. The BNC cables are 50
Ω coaxial cables. The back panel
connections for the crystal/oscillator inputs are labeled SENSOR 1 and SENSOR 2. The length of wire
between the feedthrough and the oscillator should be 30" or less. If there is enough room on the outside of
the chamber, the oscillator can be directly connected to the feedthrough connector, otherwise a 6" BNC
terminated cable is used to interconnect the oscillator to the feedthrough. The water pipes or separate
mounting hardware provides mechanical support for the crystal sensor head in the vacuum chamber.
Plumbing is accomplished by bending, cutting, TIG welding, silver soldering or by using Swagelok
compression fittings. The crystal sensor head, as it is mounted in the chamber, typically sees more or less of
a deposition than the substrate. (The crystal sensor head may be closer or further away from the source than
is the substrate.) To compensate for this, the tooling factors are user entered via programming menus. To
exclude particle droplets, the crystal sensor should be at least 10" from the evaporant source. Water flow
rate needs to be adequate to properly cool the crystal sensor head[s] (typically 0.2 – 0.3 gpm). Shutters are
controlled by compressed air, which is controlled by solenoids, which are controlled by output relays,
which are controlled by an I/O program. A host port command can indirectly control a relay through a
running I/O program.
purpose: Connect a crystal sensor head to the deposition controller to make thickness measurements or to
control a deposition process that is programmed to deposit a material [or materials] at a programmed
thickness.
background/conceptual info: pages 33, section 2
detailed info: pages
see index keyword
programming summary: Fixed MENU key
⇒ REVIEW SS MAP key →
MASTER TOOLING (global tooling offset)
Channel x TOOLING (individual channel tooling)
SECTION 10.XX page 282 of 292