INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 291)

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STC-2000A DEPOSITION CONTROLLER
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date___-___-___ [copy this page to record map parameters]
Source Sensor Map Parameters for Map #________ in Film #_______ in Process #________:
Source Sensor Full Power Volts
2.5, 5, 10 full scale volts
Source Sensor Max Power Value 0.0% - 100.0%
Source Sensor Analog Output Chnl 1 – 2 Channel Selection
Master Tooling Value 10.0% - 400.0%
Minimum Start Xtal Channels 1 – 2 minimum channels
Minimum Backup Xtal Channels 0 – 1 minimum channels
Minumum Active Xtal Channels 1 – 2 minimum channels
Xtal Channel Drop Filter NONE, BALANCE
Indexer Synchronization Mode NONE, DELAY, FEEDBACK
Indexer Synchronization Time 2 – 999 seconds
Channel 1 Start Mode OFF, ACTIVE, STANDBY
Channel 1 Fail Action Mode NONE, ABORT FILM
Channel 1 Backup List X – XXXXXXXX
Channel 1 Tooling Value 10.0% - 400.0%
Channel 1 Weight 10.0% - 400.0%
Channel 2 Start Mode OFF, ACTIVE, STANDBY
Channel 2 Fail Action Mode NONE, ABORT FILM
Channel 2 Backup List X – XXXXXXXX
Channel 2 Tooling Value 10.0% - 400.0%
Channel 2 Weight 10.0% - 400.0%
SECTION 12.XX page 291 of 292