INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual
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STC-2000A DEPOSITION CONTROLLER
y
capable option unit.
5
START2
Same as START1 except for Film 2.
6
START3
Same as START1 except for Film 3.
7
START4
Same as START1 except for Film 4.
8
START5
Same as START1 except for Film 5.
9
START6
Same as START1 except for Film 6.
10
START7
Same as START1 except for Film 7.
11
START8
Same as START1 except for Film 8.
12
START9
Same as START1 except for Film 9.
13
MANLON
A manual on event triggered, possible ignored.
14
MANLOF
A manual off event, possible ignored.
15
MUPDT
A manual pendant update generated, caused by pendant logic or
computer interface to control manual power when in manual. Ties
into status command G MCTL(3) = 0..3.
16
FTRG
Final thickness trigger event. Caused by measurement logic or
I/O or computer interface.
17
XFAIL
Crystal fail event. Caused by measurement logic or I/O or
computer interface.
18
MLACK
Memory Loss Acknowledge event. Caused at power up by
depressing manual button when prompted, or can be caused
through computer interface.
19
ZERO
Thickness zero event, caused through automatic process flow or
via computer interface, I/O or front panel.
20
SPTIME
Setpoint time event.
21
SPTHIK
Setpoint thickness event.
22
PHANTOM
Obsolete, no longer used.
23
PHANTOM
Obsolete, no longer used.
24
CILK00
Computer event links, can only be caused by an RS232/command
or the I/O logic system. Used to tie the I/O ladder system into the
remote host.
25 CILK01
See
CILK00.
26 CILK02
See
CILK00.
27 CILK03
See
CILK00.
28 CILK04
See
CILK00.
29 CILK05
See
CILK00.
30 CILK06
See
CILK00.
31 CILK07
See
CILK00.
32 CILK08
See
CILK00.
33 CILK09
See
CILK00.
34
BRKWT
Break wait event, caused by I/O system, Front Panel Start or host
computer in systems with sequencing enabled.
35
FLMRE
Film reset event, caused by I/O system, Front Panel Start or host
computer in systems with sequencing enabled.
36
LYRADV
Layer Advance, caused by I/O system, Front Panel Start or host
computer in systems with sequencing enabled.
37
PRCRE
Process reset, caused by I/O system, Front Panel Start or host
computer in systems with sequencing enabled.
38
STRTUNC
Process start unconditional, caused by I/O system or host
computer in systems with sequencing enabled.
39
SECTIM
Second metronome timer event, triggered on period of one
second. Usefull for establishing timebase in I/O or host interfaces.
40
MINTIM
Minutes metronome timer event, triggered on period of one
minute. Usefull for establishing timebase in I/O or host interfaces.
41
HRSTIM
Hours metronome timer event, triggered on period of one hour.
SECTION 6.XX
page 238 of 292