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INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual

Page 238

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STC-2000A DEPOSITION CONTROLLER

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capable option unit.

5

START2

Same as START1 except for Film 2.

6

START3

Same as START1 except for Film 3.

7

START4

Same as START1 except for Film 4.

8

START5

Same as START1 except for Film 5.

9

START6

Same as START1 except for Film 6.

10

START7

Same as START1 except for Film 7.

11

START8

Same as START1 except for Film 8.

12

START9

Same as START1 except for Film 9.

13

MANLON

A manual on event triggered, possible ignored.

14

MANLOF

A manual off event, possible ignored.

15

MUPDT

A manual pendant update generated, caused by pendant logic or
computer interface to control manual power when in manual. Ties
into status command G MCTL(3) = 0..3.

16

FTRG

Final thickness trigger event. Caused by measurement logic or
I/O or computer interface.

17

XFAIL

Crystal fail event. Caused by measurement logic or I/O or
computer interface.

18

MLACK

Memory Loss Acknowledge event. Caused at power up by
depressing manual button when prompted, or can be caused
through computer interface.

19

ZERO

Thickness zero event, caused through automatic process flow or
via computer interface, I/O or front panel.

20

SPTIME

Setpoint time event.

21

SPTHIK

Setpoint thickness event.

22

PHANTOM

Obsolete, no longer used.

23

PHANTOM

Obsolete, no longer used.

24

CILK00

Computer event links, can only be caused by an RS232/command
or the I/O logic system. Used to tie the I/O ladder system into the
remote host.

25 CILK01

See

CILK00.

26 CILK02

See

CILK00.

27 CILK03

See

CILK00.

28 CILK04

See

CILK00.

29 CILK05

See

CILK00.

30 CILK06

See

CILK00.

31 CILK07

See

CILK00.

32 CILK08

See

CILK00.

33 CILK09

See

CILK00.

34

BRKWT

Break wait event, caused by I/O system, Front Panel Start or host
computer in systems with sequencing enabled.

35

FLMRE

Film reset event, caused by I/O system, Front Panel Start or host
computer in systems with sequencing enabled.

36

LYRADV

Layer Advance, caused by I/O system, Front Panel Start or host
computer in systems with sequencing enabled.

37

PRCRE

Process reset, caused by I/O system, Front Panel Start or host
computer in systems with sequencing enabled.

38

STRTUNC

Process start unconditional, caused by I/O system or host
computer in systems with sequencing enabled.

39

SECTIM

Second metronome timer event, triggered on period of one
second. Usefull for establishing timebase in I/O or host interfaces.

40

MINTIM

Minutes metronome timer event, triggered on period of one
minute. Usefull for establishing timebase in I/O or host interfaces.

41

HRSTIM

Hours metronome timer event, triggered on period of one hour.

SECTION 6.XX

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