Stc-2000a deposition controller – INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual
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STC-2000A DEPOSITION CONTROLLER
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ID Number
Valid Functions - Type
Class
Description
0 To 7
I - B
I/O
Remote Inputs 1 Through 8 (slot 1)
8 To 15
All - B
I/O
Relay Outputs 1 Through 8 (slot 2)
16 To 23
I - B
I/O
Remote Inputs 1 Through 8 (slot 3)
24 To 31
All - B
I/O
Relay Outputs 1 Through 8 (slot 4)
32 To 39
All - B
I/O
Relay Outputs 1 Through 8 (slot 1) [see ID 0-7, slot 1]
40 To 47
I - B
I/O
Remote Inputs 1 Through 8 (slot 2)
48 To 55
All - B
I/O
Relay Outputs 1 Through 8 (slot 3)
56 To 63
I - B
I/O
Remote Inputs 1 Through 8 (slot 4)
64 To 67
All - B
I/O
leftmost=64, rightmost=67 front panel LED indicators
68 To 71
I - B
I/O
leftmost=68, rightmost=71 fixed front panel function keys
72
I - B
Istate
Manual Mode [true/false]
73
I - V
Istate
Stopped Mode - Power Up [0]
73
I - V
Istate
True If Not In Any Stopped Mode [1]
73
I - V
Istate
Stopped Mode - Crystal Bad [2]
73
I - V
Istate
Stopped Mode - Remote I/O [3]
73
I - V
Istate
Stopped Mode – Front Panel [4]
73
I - V
Istate
Stopped Mode – Max. Power Abort [5]
73
I - V
Istate
Stopped Mode – Hand Controller [6]
73
I - V
Istate
Stopped Mode – User Interface Presence Lost [7]
73
I - V
Istate
Stopped Mode – Measurement Comm. to SS Card Lost [8]
73
I - V
Istate
Stopped Mode – Communication to I/O Card Lost [9]
73
I - V
Istate
Stopped Mode – Bus Hold Integrity Error [10]
73
I - V
Istate
Stopped Mode – Rotator Time-out Failure [11, 12...19]
74
I - V
Istate
Film 1 Through 50 Active [# 1-50] (0 if non-sequencing mode)
75
I - V
Istate
Process 1 Through 9 Active [# 1-9]
76
I - V
Istate
Polling Current Layer Info (0-99)
77
I - B
Istate
Sequencer Running a Process = True / at Rest = False
78
I - M
Istate
True If Power = 0%. Bitmap 8 sources
79
I - M
Istate
True If Source Shutter Open During Deposit Phase
80
I - V
Istate
Phase – Power Up [0]
80
I - V
Istate
Phase – Stopped At Zero Power [1]
80
I - V
Istate
Phase – Begin Crystal Verify [2]
80
I - V
Istate
Phase – Rise 1 [3]
80
I - V
Istate
Phase – Soak 1 [4]
80
I - V
Istate
Phase – Rise 2 [5]
80
I - V
Istate
Phase – Soak 2 [6]
80
I - V
Istate
Phase – Soak Hold [7]
80
I - V
Istate
Phase – Shutter Delay [8]
80
I - V
Istate
Phase – Deposit [9]
80
I - V
Istate
Phase – Rate Ramp [10]
80
I - V
Istate
Phase – Deposit After Rate Ramp [11]
80
I - V
Istate
Phase – Time/Power Recovery Phase [12]
80
I - V
Istate
Phase – Idle Ramp [13]
80
I - V
Istate
Phase – Idle Power After Successful Deposit [14]
80
I - V
Istate
Phase – Idle From Time-Power Mode [15]
80
I - V
Istate
Phase – Manual Control [16]
80
I - V
Istate
Phase – Ready After Stop – Waiting For Start [17]
80
I - V
Istate
Phase – Indexing To Pocket [18]
80
I - V
Istate
Phase – Hold Film Before Rise/Soak [19]
81
I - M
Istate
XTAL Shutter State- All Sensor Shutters Closed [0]
81
I - M
Istate
XTAL Shutter State- Sensor #1 = Shutter Open [1]
81
I - M
Istate
XTAL Shutter State- Sensor #2 = Shutter Open [2]
81
I - M
Istate
N.A.
81
I - M
Istate
N.A.
81
I - M
Istate
N.A.
81
I - M
Istate
N.A.
81
I - M
Istate
N.A.
81
I - M
Istate
N.A.
81
I - M
Istate
XTAL Shutter State- All Sensor Shutters Open [255]
82
I - M
Istate
SRC Being Modified or Designated as Active
83
I - M
Istate
Xtal Used Map- Sensors Making Active Contribution
84
I - M
Istate
Xtal Standby Map- Sensors In Standby Mode
Function Index
I INPUT
O OUTPUT
T TRIP
A ARM
D DROP
S SET
C CLEAR
Type Values
B Boolean
V Scalar
M Bitmap
(combined bit
weights)
E Event
SECTION 5.XX
page 162 of 292