INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 220)

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STC-2000A DEPOSITION CONTROLLER
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[RZCD_AOK][data_value] if proper data # (1..13) id was sent. Exact format of [data_value]
depends on the particular parameter for which the data was requested.
[RZCD_ILDV] if improper value for parameter argument.
[RZCD_ILSN] if too many arguments, wrong delimiters, etc..
Command E, Read RunTime Data Parameters
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Parameter 1
Power Level Output
access index: PWRLVL power level, in units of .1 percent, 0.. 1000, of active source.
Value Range 0 To 1000
Units 10 X Percent
This parameter reads the current power being supplied to the active control output. It is in percent of full
scale x 10. If the number 123 is returned, this represents 12.3%.
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Parameter 2
Deposition Rate
access index: RATEVL rate value, +- 0 .. 999.9 A/s, as 0 .. 9999
Value Range 0 To 9999
Units 10 X Å/s
This is the current deposition rate as is displayed on the RunTime display. If the number 123 is returned,
this represents 12.3 Å/s.
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Parameter 3
Thickness
access index: THKVL thickness value, angstroms, 0 .. +- 999999
Value Range 0 To 999999
Units Angstroms
This is the current thickness value as is displayed on the RunTime display. The units that are displayed are
in KÅ, but the units sent across the computer interface are in angstroms. A number returned of 1234 means
1.234 KÅ.
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Parameter 4
Phase Timer
access index: PHSTMR phase timer, counts up or down
Value Range 0 To 5999
Units Seconds
This returns the time into the current phase (such as deposit). This is similar to the number on the RunTime
display, except that the time is in seconds instead of minutes:seconds.
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Parameter 5
Running Timer
access index: RUNTMR running timer, counts up
Value Range 0 To 5999
Units Seconds
This returns a general timer function that is always running during a process. It pegs at 5999 and resets
when you start a new process.
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Parameter 6
Rate Deviation
access index: RDEVTN rate deviation value, +- 0 .. 999.9 A/s, as 0 .. 9999
Value Range 0 To
±9999
Units 10 X Å/s
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