INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 5)

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STC-2000A DEPOSITION CONTROLLER
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. [please read and understand this manual before proceeding w/ equipment useage] .
SECTION 1.2 MANUAL DESCRIPTION
Please read and understand the contents of this manual before proceeding with equipment useage in a
working system. This manual will take the reader through the appropriate setup and example steps,
providing along the way, an understanding of how the STC-2000A instrument is used. A test mode is
available from the SERVICE menu for simulated out of system experiments. Crystal sensor head
information is simulated (actually rate info is simulated for the film) allowing setup of various
parameters/programming elements without crystal failure halting the simulated process. The power supply
control voltage output is, however, active while in the test mode. All these terms will be described shortly.
This manual is organized into a number of main sections: specifications, generalized overview,
menu programming specifics and setup, hardware setup, detailed host communications, microbalance
theory and maintenance. If any further assistance is needed, please contact Sycon (see section 1.6).
The specifications section describes STC-2000A product specifics, both hardware and software,
along with related necessary and optional product specifics. The software specifics include programmable
parameter lists.
The generalized overview section answers the what, the how is it used and the how does it work
questions about the STC-2000A, that is, the solutions this product can provide. This section is intended to
discuss the concepts of main functions and elements with only enough detail to make the conceptualization
clear. In addition, rudimentary specifics are given in a number of other areas as an introduction or a primer
for the next section. This is information you typically only need to look at once. Experienced users (those
familiar with deposition controllers) should at least thumb through this section to take an inventory of what
is available.
The menu programming specifics and operational details section provides detailed information
about product programming. Experienced users (those familiar with deposition controllers) may decide to
start here. If some elements are unclear, check back to the previous section. The table of contents and index
are helpful in this pursuit. This section provides descriptions for the programming of film parameters and
process steps, descriptions of menu navigation, descriptions of screens, descriptions of fixed front panel
keys, descriptions of run modes, parameter details, memory defaults, programming summaries, etc.
The hardware setup section describes and illustrates connectors, interconnections, peripherals,
mechanical connections, and the STC-2000A as a component in a larger system.
Detailed host communications are found in section 6.
See section 7 for Microbalance theory and thickness reading calibration with its attendant density,
z factor (a material reference table of elements is included) and tooling determination. Each section builds
on the previous sections such that no new elements are used that haven't been defined.
You can lead a customer to water
but you can't make them read the
manual
.
If all else fails
read the manual
.
. Some sage advice that is
seldom heeded.
.
The following is text box contains a Quick Index to information for those who are familiar with and know
how to use the STC-2000A. PLEASE BE ADVISED THAT USE OF THE STC-2000A AND
RELATED EQUIPMENT CAN PRESENT MANY HAZARDOUS SITUATIONS WITH SAFETY
CONCERNS THAT INCLUDE ELECTROCUTION AND EXPLOSION. DO NOT USE THE STC-
2000A AND RELATED EQUIPMENT WITHOUT FULLY UNDERSTANDING HOW THEY ARE
USED. If you don't fully understand how to use this equipment, the Quick Index can be incorrectly
used to create a dangerous situation rapidly. The best method of learning instrument use is to read the
manual and exercise the STC-2000A, disconnected from any system, as its features are described.
cautions
SECTION 1.XX page 5 of 292