INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 19)

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STC-2000A DEPOSITION CONTROLLER
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Film Parameter Dependency List:
Material Density Not Applicable
Material Z-Factor N.A.
Setpoint Thickness Limit N.A.
Final Thickness Limit (Trigger) Service Menu Parameter: Non Seq / Accept
Setpoint Time Limit N.A.
Soak 1 Power level Value N.A.
Power Ramp 1 Time (to pwr level) N.A.
Power Soak 1 Time (@ pwr level) N.A.
Soak 2 Power level Value
N.A.
Power Ramp 2 Time (to pwr level) N.A.
Power Soak 2 Time (@ pwr level) N.A.
Soak 3 Power level Value
N.A.
Power Ramp 3 Time (to pwr level) N.A.
Deposit Rate (requested)
N.A.
Rate Ramp Mode N.A.
New Deposit Rate Value Film Parameter: Rate Ramp Mode = ON
Rate Ramp Time Duration Film Parameter: Rate Ramp Mode = ON
Rate Ramp (Thickn) Trigger Point Film Parameter: Rate Ramp Mode = ON
Control Loop –Proportional term- N.A.
Control Loop –Integral term-
N.A.
Control Loop –Derivative term- N.A.
Max Power Limit N.A.
Abort Max Power SW N.A.
Max Power Dwell Film Parameter: Abort Max Power SW = ON
Shutter Delay Mode N.A.
Shutter Delay TIMEOUT Film Parameter: Shutter Delay Mode = ON
Shutter Delay QUALITY Film Parameter: Shutter Delay Mode = ON
(XTAL) RATE SAMPLING
N.A.
(XTAL) SAMPLE INTERVAL (Film Parameter: (XTAL) RATE SAMPLING = Timed
or
Film Parameter: (XTAL) RATE SAMPLING = Inteli)
(XTAL) SAMPLE DWELL TIME Film Parameter: (XTAL) RATE SAMPLING = Timed
(XTAL) SAMPLE QUAL
Film Parameter: (XTAL) RATE SAMPLING = Inteli
(XTAL) SAMPLE ALARM TIME Film Parameter: (XTAL) RATE SAMPLING = Inteli
FILM Fail Mode
N.A.
Control Loop Qual Limits N.A.
XTAL Stability S Limits N.A.
XTAL Life Bounds N.A.
Plot Vert Scale Volts N.A.
Plot Horiz Scale H N.A.
Data Plot Type N.A.
Source Sensor MAP SELECT N.A.
POCKET SELECT N.A.
ETCHING MODE N.A.
Main Menu value Dependency List:
Next Active Process (Select)
1
Service Menu: Sequence Able + Accept keys (for Sequencing Mode)
2
If N/A, must use START + Reset / Start Proc keys to start a process.
Next Active Film (Select)
1
Service Menu: Non-Sequence + Accept keys (Non-Sequencing Mode)
2
Review Process (Select) Service Menu: Sequence Able + Accept keys (for Sequencing Mode) 2
Review Film (Select) N.A.
Review Source/Sensor Map (Sel) N.A.
SECTION 1.XX page 19 of 292