INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual

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STC-2000A DEPOSITION CONTROLLER

89, the inserted step is placed at the previous last step plus one. For example, if prior to the X1, 89=1
command above the last step was 3, then a new step 4 was created.

Command Y1

Response A1
Description

Command to query step 13 of process 1 is successful. The 1 value indicates the step is

occupied and is an AUTO step.

Command Z1

13=2

Response A
Description

Command to reprogram step 13 of process 1 is successful. The new mode of the step is

WAIT.

Command a9

Response A4
Description

Command to query step 3 of process 9 is successful. The numeric return of 4 indicates

film 4 is the active film for step 3 of process 9.

Command b4,5=6
Response A4
Description

Command to set step 5 of process 4 to film #6 is successful.

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Measurement Substitution Group

Group 14 –

Commands e,f,g

These commands substitute or over-ride measurement modes.

(e) - Over-rides thickness measurement.

(f) - Substitutes measurement mode.

(g) - Substitutes rate measurement mode.

Measurement Substitution Group(e,f,g)
The

‘e’ command either queries (if parameter is ?) or sets the measurement override system. A

setting of 0 disables the override and allows the system to make measurements from the crystal sensor. A
value of 1 selects thickness override and the STC-2000A uses thickness values provided via the
communications link using the (‘f’) command below. A value of 2 selects rate override mode, where the
‘f’ command updates rate information, and this rate is integrated to produce thickness update within the
instrument. A value of 3 selects dual override, where both datum are substituted, with the thickness value
sent with the ‘f’ command, and the rate encoded with the ‘g’ command.
The

‘f’ command sends a numeric value which has meaning when the instrument is set in a

thickness override (1,3) or rate override (2) mode. If instrument is in 0 mod, then the value is ignored.
Values from -9999999 to 9999999 allowed. Tenth Angstrom or hundredths A

°/sec units.

The

‘g’ command sends a numeric value which has meaning when the instrument is set in dual

rate/thickness override (3) mode. If the instrument is in modes 0,1,2 then the value is ignored. Values
from -999999 to 9999999 hundredths A

°/sec allowed

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SECTION 6.XX

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