INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual

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STC-2000A DEPOSITION CONTROLLER

one for the I/O rungs (Main Menu: Executive Menu: I/O Setup). See sections 2.5, 2.7, 5.10 and 5.13 for
related details. See the end of section 2.6, Processes: Factory settings vs. purged settings.
Each of the three program types have check sums that can be used to check the integrity of a program
which is a part of a system that has a problem or check the integrity of a program that may have been
inadvertently changed or verify a program that is reentered in its entirety. A group of check sums from the
different programs can be used to uniquely identify an entire deposition process. The programs along with
their check sums should be stored both electronically and on paper. Different processes can be identified by
a text description coupled with constituent programs and their check sums. When a program is known to
be correct, write the check sum number down in a journal of software entries/programs, having method or
recipe attributes being integral to objectives.
Please note that as changes, additions or deletions are edited, the commensurate check sum change will not
become apparent until the modification is accepted (saved) into the program from the temporary
workspace.

The check sum is a five digit hexadecimal number (e.g. 4A6F6, 5204D). The number is prefixed

by the label "ID=" (except for the film parameters check sum, which is prefixed by an "X"). In addition, the
I/O program has, following the "ID=", a letter designator indicating the memory sector in which the
program resides (either an A or B). Using the SWP (swap) key accessed through the MEM key reverses
this.

Check sums and paramters after a PURGE or a FACTORY RESTORE are as follows:

After
PURGE

After
FACTORY RESTORE

Review films 1-9:

X17523

X61037

Review Process 1:

ID=00000

ID=55274

Review Process 2:

ID=00000

ID=12121

Review Process 3:

ID=00000

ID=30944

Review Process 4:

ID=00000

ID=24150

Review Process 5:

ID=00000

ID=02503

Review Process 6:

ID=00000

ID=61768

Review Process 7:

ID=00000

ID=09958

Review Process 8:

ID=00000

ID=48200

Review Process 9:

ID=00000

ID=60411

I/O Program A:

ID=A24490

I/O Program B:

ID=B24490

RunTime Mode:

Sequencing not

changed

(remains SEQ or NON-SEQ)

Film parameter:

MAX POWER LIMIT

50%

System configuration:

RECORDER FUNCTN:

RATE

POWER

CLOCK TIME:

not changed

CLOCK DATE:

not changed

I/O Programs:

cleared not

changed

PROCESS ACCT'ING:

cleared cleared

See section 2.2, Initial Programming Setups (Menu Parameters), for complete listings of parameter states
after factory default memory configuration and purged memory configuration. See next section for optional
external memory save / restore functions.

SECTION 3.XX

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