Stc-2000a deposition controller – INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual
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STC-2000A DEPOSITION CONTROLLER
y
115
I - V
Istate
Sensor Slot A Status: PCB that was initially OK, now fails [6]
116
I - V
Istate
N.A.
117
I - V
Istate
N.A.
118
I - V
Istate
N.A.
119
I - V
Istate
Source Channel 1 Sensor Head Status: Off, Not Needed [0]
119
I - V
Istate
Source Channel 1 Sensor Head Status: Active, Contributing [1]
119
I - V
Istate
Source Channel 1 Sensor Head Status: Dropped, OK Failed [2]
119
I - V
Istate
Source Channel 1 Sensor Head Status: Failed, no replacem't [3]
119
I - V
Istate
Source Channel 1 Sensor Head Status: Missing, Config Err [4]
119
I - V
Istate
Source Channel 1 Sensor Head Status: Standby, backup list [5]
119
I - V
Istate
Source Channel 1 Sensor Head Status: Switched, fail to bak [6]
120
I - V
Istate
Source Channel 2 Sensor Head Status: (see Channel 1)
121
I - V
Istate
N.A.
122
I - V
Istate
N.A.
123
I - V
Istate
N.A.
124
I - V
Istate
N.A.
125
I - V
Istate
N.A.
126
I - V
Istate
N.A.
127
I - M
Istate
Verify Memory: Invalid Section: Film Parameters Area [1]
127
I - M
Istate
Verify Memory: Invalid Section: I/O Programming Area [2]
127
I - M
Istate
Verify Memory: Invalid Section: Process Accounting Area [4]
127
I - M
Istate
Verify Memory: Invalid Section: Process Sequence Area [8]
127
I - M
Istate
Verify Memory: Invalid Section: Archive fail (to Mem Mod) [16]
127
I - M
Istate
Verify Memory: Invalid Section: Clone fail (to Dep Contrlr) [32]
127
I - M
Istate
Verify Memory: Invalid Section: Clone OK [64]
128
I - B
Istate
Needs Reboot or Service, fatal error
129-149
Available
150
IO - B
Ustate
Resets / Sets Soak Hold Mode
151
IO - B
Ustate
Sample Off / On When In Sample/Hold Mode
152
IO - B
Ustate
Film Hold Off / On (requires event trig leave)
153
IO - M
Ustate
Set Deposition Power to 'Zero' (Unconditional) [Off = 0, On = 1]
153
IO - M
Ustate
No Sources Overridden, Source is at System Power [0]
153
IO - M
Ustate
Source #1 Overridden to Zero Power [1]
153
IO - M
Ustate
Source #2 Overridden to Zero Power [2]
153
IO - M
Ustate
N.A.
153
IO - M
Ustate
N.A.
153
IO - M
Ustate
N.A.
153
IO - M
Ustate
N.A.
153
IO - M
Ustate
N.A.
153
IO - M
Ustate
N.A.
153
IO - M
Ustate
All Sources Overridden To Zero Power [255]
154
IO - B
Ustate
M
easured rate not = desired Rate. (>=), set true when Rate > desired, user clr
155
IO - B
Ustate
Check if Zeroing is allowed on entering deposit (T = Skip)
156
IO - V
Ustate
I/O scalar analog out (0-255) times multiplier changes output
157
IO - V
Ustate
Launch Film number ___
158-169
Available
170-199
IT
Event
Computer Events 00 To 29
200 IT Event
Stop
201
IT / All
Evnt/Stat
Non-Seq Mode = Proc Start Event Req./ Seq Mode = Soft Node
202
IT / All
Evnt/Stat
Non-Seq Mode = Generic I/O Start / Seq Mode = Soft Node
203 IT Event
Switch
to Process 1 and Start it [non-seq mode = to Film]
204 IT Event
Switch
to Process 2 and Start it [non-seq mode = to Film]
205 IT Event
Switch
to Process 3 and Start it [non-seq mode = to Film]
206 IT Event
Switch
to Process 4 and Start it [non-seq mode = to Film]
207 IT Event
Switch
to Process 5 and Start it [non-seq mode = to Film]
208 IT Event
Switch
to Process 6 and Start it [non-seq mode = to Film]
209 IT Event
Switch
to Process 7 and Start it [non-seq mode = to Film]
210 IT Event
Switch
to Process 8 and Start it [non-seq mode = to Film]
211 IT Event
Switch
to Process 9 and Start it [non-seq mode = to Film]
212
IT
Event
Break Process Wait
213 IT Event
Restart
Film
214
IT
Event
Start Next Layer
215
IT
Event
Process Reset / Start
216
IT
Event
Seq Mode: Unconditional Process Start by I/O or Host Comp.
ID number | Valid Functions – Type | Class | Description
SECTION 5.XX
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