INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 225)

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STC-2000A DEPOSITION CONTROLLER
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Parameter 50 N.A.
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Parameter 51
N.A.
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Parameter 52
N.A.
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Parameter 53
N.A.
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Parameter 54
xtal stability accumulated from sensor 1
access index: XSTAB1
Value Range 0 To 9
Units None
1 of 8 in a contiguous block. Associated card needs to be physically installed and enabled before a reboot.
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Parameter 55
xtal stability accumulated from sensor 2
access index: XSTAB2
Value Range 0 To 9
Units None
2 of 8 in a contiguous block. Associated card needs to be physically installed and enabled before a reboot.
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Parameter 56
N.A.
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Parameter 57
N.A.
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Parameter 58
N.A.
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Parameter 59
N.A.
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Parameter 60
N.A.
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Parameter 61
N.A.
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Read RunTime Data Command Examples
Command
E3 or E 3
Response A-1
Description
Read Deposition Thickness In Angstroms. Thickness is Minus 1 Angstrom.
Command E4
Response A93
Description
Read Phase Timer. Timer is 93 Seconds, Or 1 Minute, 33 Seconds.
Table 20.2: Group 4 Examples.
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SECTION 6.XX page 225 of 292