INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 245)

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STC-2000A DEPOSITION CONTROLLER
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The set of L commands are used to read the process accounting information from the STC-2000A
to the host computer. There are 2 parameters that are passed. The first is a single digit from 0 through 3.
This indicates which set of parameters is to be read. The number 0 is the most recent and 3 is the oldest.
The second parameter defines what piece of information will be read. Table 6.18 lists the numbers and
parameters.
Process Accounting
Index
Address
/ ID
Mnemonic Description
0 PA_date Date of process run, calendar MM/DD/YY as 6 digits.
1 PA_time Time, clock hrs/mins in military HH:MM .
2 PA_rnno Run #, 0.9999. Followed by 'T' if a test mode run.
3 PA_procid Process #, 1..9 if sequencing, 0 if non-sequencing.
4 PA_lyrn Layer number if sequencing, 1..99, # of step in sequence.
5 PA_flmn Film # , 1..50.
6 PA_map Source-Sensor Map reference number, 1..10.
7 PA_source Source channel for power, 1..2 or 0 if invalid source.
8 PA_pocket Pocket number associated with film. 0..63.
9 PA_tdep Time of shutter open in seconds.
10 PA_ethk Ending thickness.
11 PA_erate Ending rate.
12 PA_pwrv Power value at shutter close.
13 PA_loop Loop accum at shutter close, 0..99.
14 PA_x1use Life reading for xtal 1 at beginning/end.
15 PA_x2use Life reading for xtal 2 at beginning/end.
16 PA_x3use Life reading for xtal 3 at beginning/end.
17 PA_x4use Life reading for xtal 4 at beginning/end.
18 PA_x5use Life reading for xtal 5 at beginning/end.
19 PA_x6use Life reading for xtal 6 at beginning/end.
20 PA_x7use Life reading for xtal 7 at beginning/end.
21 PA_x8use Life reading for xtal 8 at beginning/end
22 PA_tproc Time of process, start to idle or stop.
23 PA_stat Process run completion status, stopped/why, normal idle, tpwr, etc... from
completion status messages below.
0
NORMAL normal completion, reached idle.
1 TIMPWR completed to idle, time power during deposit.
2 BADXTL crystal bad.
3 REMOTE remote from I/O system.
4 KEYBRD front panel
5 MAXPWR max power condition persisted too long.
6 PENDNT remote pendant stop.
7 SAFE 1 User Interface subsystem failure.
8 S4 BAD Measurement module systems failure
9 IO BAD I/O module/plugin failure.
10 0 BHIE Measurement Bus Hold failure.
11 INDEXR Indexer feedback timeout failure
12 INVSRC Invalid source associated with Map/Film
13 INVSNS Invalid sensor associated with Map.
14 IO_AX1 I/O auxiliary stop 1
15 IO_AX2 I/O auxiliary stop 2
16 IO_AX3 I/O auxiliary stop 3
17 IO_AX4 I/O auxiliary stop 4
18 QUALDLY Failed quality while in shutter delay
SECTION 6.XX page 245 of 292