INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 21)

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STC-2000A DEPOSITION CONTROLLER
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(I/O parameters) Main Menu/ Executive Menu/ Communications Setup: Com/IO Lock
Code [non-zero value enables the password dependency and is itself the
password.]**
(all other parameters) Main Menu/ Executive Menu/ System Configuration: Password Lock #
[non-zero value enables the password dependency and is itself the
password.]**
**Note: If password is forgotten and programming has not been saved in some
other media, call factory to eliminate passwords without purging memory.
.
sensor specs
(1.5) .
SECTION 1.9
Sensor Specifications
Low Profile P/N 500-042 Right Angle P/N 500-088
Figure 2.1: Standard Sensors.
Operation
Maximum Temperature ............................................................. 200 °C
Water Line and Coax Length ................................................... 30 inches
Sensor Mounting ...................................................................... Rear of Body, #4-40 Tapped
Feedthrough Installation
Water
Connections ................................................................ Two Required
Type ........................................................................... 1/8 inch OD. Stainless Tubing
Flow Rate .................................................................... 0.2 to 0.3 gal/min.
Water Temp................................................................. 50 °C max.
SECTION 1.XX page 21 of 292