INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 135)

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STC-2000A DEPOSITION CONTROLLER
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Figure 3.19: Change the Active Process (see Section 2.19)
Running The Test Program
Starting the Test Program
We have now completed all the programming necessary for our 6 layer, 2 film process. We can
now return to the RunTime Screen by pressing the fixed STATUS key. To start our test process we first
need to reset any error conditions shown in the process status area on the Run Time screen. Since a power
outage is considered to be an abnormal occurrence, the STC-2000A turns on with a process error message
showing. This condition must be reset prior to being able to start a process. This is done by pressing the
key combination that was identified in the START SELECTION menu as Reset / Start Process (fixed
START key). This resets the error condition and takes the STC-2000A to PROCESS RESTING. Pressing
the fixed START key brings up the START SELECTION menu again. If, as in this case, the initial error
condition did not occur in the middle of a process, START: Reset / Start Process is the appropriate choice.
If the power loss or other error condition had occurred in the middle of running a process, START: Restart
Film or START: Next Layer could be used to recover or continue the process. Pressing START: Reset /
Start Process again will reset the process to the beginning layer. Pressing START: Reset / Start Process
one more time will begin the process. Once started the process status line across the middle of the screen
will read as follows:
Figure 3.20: Process Status Line
PROC 1 : PROC BUSY LAYER 1
You will notice the STC-2000A goes into a XTAL VFY mode for a second, but in the test mode
the crystal status is ignored. In the upper right corner "XTAL 1 ???" will appear while in the test mode
before a process is run (BAD after process starts). See START: Reset/Start Process diagram below.
Note
Note If the text 'TEST' does not appear in the box to the left of the crystal information at this
point, the unit is not in the TEST mode. Enter the TEST mode as described in the second paragraph of
Section 2.7.)
The STC-2000A will then enter the RISE 1 phase for film 1. Notice the RUN (TIME) number on the
display counting up while the PHASE (TIME) counts down. When the PHASE (TIME) reaches 0:00, the
next phase is entered. At this point, you will see SOAK 1 appear on the display. The power level will
remain at 15.0% for the 10 seconds that the STC-2000A is in the SOAK phase for film 1.
When
the DEPOSIT phase is entered, the THICK number on the display is zeroed and will start
accumulating. The PHASE (TIME) now starts counting up. The RATE number is near 20 Å/s and the
SECTION 3.XX page 135 of 292