INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 236)

p
STC-2000A DEPOSITION CONTROLLER
y
Command F9
Response A17
Description
Query The Status Parameter 9, Phase Status. Process Sequence is At Ready Phase.
Command F
10
Response A0
Description
Query The Crystal Shutter Status. Shutter is Non-Eclipsed, Not In Hold Mode.
Table 68: Group 5 Examples.
______________________________________________________________________
Write Status Information (G)
Only eight parameters are valid (1,2,3,17,21, 22, 23,24). See above for access.
______________________________________________________________________
Parameter 1
Soak Hold Status
Value Range 0,1
Units False/True
This parameter sets if a soak hold state is desired. A value of 1 forces it to be scheduled. If soak hold is
enabled, this prevents the deposit phase from being entered.
______________________________________________________________________
Parameter 2
Forced Sample
Value Range 0,1
Units Off / On
This parameter forces a sample state On or Off. A value of 1 forces a sample.
______________________________________________________________________
Parameter 3
Manual Controller Status
Value Range 0 To 3
Units None
This parameter forces the status of the manual hand controller. It is used with a command in the next group
called manual pendant update. If you issue either an up or down command, it stays in effect (ramping the
power) until you issue an at rest command.
0
At Rest
1 Zero
2 Up
3 Down
______________________________________________________________________
Parameter 17
Film Hold
Value Range 0,1
Units False, True
If true, this parameter holds a film at the crystal verify state. The crystal verify state occurs immediately
after a film is started.
______________________________________________________________________
Parameter 21
Source Voltage Set To Zero
Value Range 0,1
Units False, True
If true, this parameter forces the source control voltage to zero volts. A false value remover this override
condition.
______________________________________________________________________
Parameter 22
At Rate
Value Range 0, 1
Units False, True
SECTION 6.XX page 236 of 292