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INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual

Page 79

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STC-2000A DEPOSITION CONTROLLER

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Parameter

CTL LOOP -D-

Control Loop Time Constant; 0.0 - 99.9

Units

Seconds

Control Loop Differential Term

This parameter sets the closed loop rate control derivative term time constant.

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Parameter

MAX POWER LIMIT

Percentage Value; Range is 0.0 - 100.0

Units

Percent

Max. Power Limit

This parameter sets the absolute maximum power level that will be allowed to occur at any time

from the instrument (for the current film in use).
Specifically, this parameter selects the maximum percent of power that will be allowed out of the
controlled power supply (named by the SOURCE OUTPUT CHANNEL parameter). This parameter and
the Map parameter Source Max Power are redundant but not without good reason. When a process is
running, the lesser value of these two parameters will be used as the limiting value. Maps are intended to be
more closely associated with the source supply in terms of their definition at setup. One map may be called
by many Films and, as a consequence, a Film may inadvertently set the power at a level beyond what is
desirable for the power supply, wiring, etc. This is a fail safe way to limit a power supply configuration in a
place close to the hardware, that is, in a map configuration.
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Parameter

ABORT MAX PWR SW

On/Off

Value

Units

None

Abort On Max. Power Switch

This parameter is a switch value. When set to Off it has no effect on the deposition sequence and

the programming data window will not access the associated max. power dwell parameter. When set to On
a maximum power condition will be allowed for the time duration set by the now accessible max. power
dwell parameter and then the STC-2000A will abort the deposition sequence and power will be set to zero.
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Parameter

MAX POWER DWELL

Elapsed Time; Range is 0:0 - 99:59

Units

Min:Sec

Max. Power Dwell

This parameter is associated with the max. power abort switch parameter and sets the allowable

duration of a maximum power condition before an abort will occur.
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Shutter Delay (has 2 dependent parameters)


This operating mode, if enabled, allows precise rate control to be established before substrates are

exposed. For this capability the sensor must be located on the source side of the substrate shutter. A sensor
shutter may also be used if desired.

Parameter

SHTR DELAY MODE

On/Off
Units

None

Enabling Shutter Delay Mode

This switch type parameter will allow the shutter delay parameters to become active and the mode

functional on an individual film basis. If set to Off, the parameter window cursor will not access the
associated parameters. If set to On, the delayed shutter operation will be performed as specified by the
following parameters. [The following 2 parameters are dependent upon this parameter.]
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Parameter

SHTR DLY TIMEOUT

Process Timer; Range 0:01 - 99:59

Units

Min:Sec

SECTION 3.XX

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