INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 222)

p
STC-2000A DEPOSITION CONTROLLER
y
Value Range 5000000.0…6000000.0, 0.0 if bad crystal
Units Hz
This is the measured frequency of the active sensing crystal.
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The following parameters (14-61) are the values as reported by physically present and enabled source
sensor card[s].
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Parameter 14
Crystal frequency from Sensor 1
access index: FREQ1 Crystal frequency from Sensor 1 in centiHz (0.01Hz) resolution.
Value Range 500,000,000-600,000,000
Units centiHz (0.01Hz)
Crystal frequency from Sensor 1 in centiHz (0.01Hz) resolution [6 MHz looks like 600,000,000].
Associated card needs to be physically installed and enabled before a reboot.
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Parameter 15
Crystal frequency from Sensor 2
access index: FREQ2 Crystal frequency from Sensor 2 in centiHz (0.01Hz) resolution.
Value Range 500,000,000-600,000,000
Units centiHz (0.01Hz)
Crystal frequency from Sensor 2 in centiHz (0.01Hz) resolution [6 MHz looks like 600,000,000].
Associated card needs to be physically installed and enabled before a reboot.
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Parameter 16
N.A.
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Parameter 17
N.A.
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Parameter 18
N.A.
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Parameter 19
N.A.
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Parameter 20
N.A.
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Parameter 21
N.A.
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Parameter 22
source 1 power level
access index: POWR1 power level, in units of .1 percent, 0.. 1000, of source 1.
Value Range 0 to 1000
Units .1 Percent
source 1 power level in units of .1 percent [100% looks like 1000]. Associated card needs to be physically
installed and enabled before a reboot.
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Parameter 23
source 2 power level
access index: POWR2 power level, in units of .1 percent, 0.. 1000, of source 2.
Value Range 0 to 1000
Units .1 Percent
SECTION 6.XX page 222 of 292