INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 149)

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STC-2000A DEPOSITION CONTROLLER
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CHART RECORDING OF 3500Å FILM
ANALOG OUTPUT
FOR THICKNESS
3500Е
3000Е 2000Е 1000Е
V
O
L
T
S
1
2
3
4
5
6
7
8
9
10
Figure- 4.4: Example of Thickness Mode Recorder Output.
Rate Mode - The analog recorder output for the rate mode is scaled for a full scale (999.9 Å/s)
reading of 10 volts. Readings up to 100.0 Å/s will be output with a resolution of 0.1 Angstrom and values
above 100.0 Angstroms will be output with a resolution of 1.0 Å/s. This method allows a continuous
recorder accuracy of at least 0.3% and also provides a unique output voltage for any rate value within the
displayable range of values. This output is unipolar with negative rates clamped at zero volts.
Rate Deviation Mode - linear from 0 to
±999.9 A°/S and 0 to 10 Volts. 0 to 999.9 A°/S generated
by voltages between (and including) 5 and 10 volts. 0 to -999.9 A
°/S generated by voltages between (and
including) 5 and 0 volts. In other words, zero rate deviation is midscale at 5 volts.
Power Mode - The analog recorder output for the power mode is scaled for a full-scale (100%)
reading of 10 volts.
RATE - ÅNGSTROMS / second
ANALOG OUPUT
FOR RATE
Slope 5.555 mv per Å/s
between 100 Å/s and 1000 Å/s
Slope 50 mv per Å/s
between 0 and 100 Å/s
100 200 300 400 500 600 700 800 900 1000
V
O
L
T
S
1
2
3
4
5
6
7
8
9
10
Figure- 4.5: Example of Rate Mode Recorder Output.
SECTION 4.XX page 149 of 292