INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 223)

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STC-2000A DEPOSITION CONTROLLER
y
source 2 power level in units of .1 percent [100% looks like 1000]. Associated card needs to be physically
installed and enabled before a reboot.
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Parameter 24
N.A.
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Parameter 25
N.A.
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Parameter 26
N.A.
______________________________________________________________________
Parameter 27
N.A.
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Parameter 28
N.A.
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Parameter 29
N.A.
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Parameter 30
Sensor 1 thickness
access index: THICK1 thick from sensor.
Value Range 0 To 999,999
Units Angstroms
Thickness from sensor 1. 1 of 8 in a contiguous block. Associated card needs to be physically installed and
enabled before a reboot.
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Parameter 31
Sensor 2 thickness
access index: THICK2 thick from sensor.
Value Range 0 To 999,999
Units Angstroms
Thickness from sensor 2. 2 of 8 in a contiguous block. Associated card needs to be physically installed and
enabled before a reboot.
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Parameter 32
N.A.
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Parameter 33
N.A.
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Parameter 34
N.A.
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Parameter 35
N.A.
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Parameter 36
N.A.
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Parameter 37
N.A.
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SECTION 6.XX page 223 of 292