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INFICON STC-2000A Thin Film Deposition Controller Operating Manual User Manual

Page 271

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STC-2000A DEPOSITION CONTROLLER

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SECTION 7.XX

page 271 of 292


Material

Symbol

Bulk Density

Z Factor

gm/cc


Thallium Tl

11.85

1.550

Thorium (IV) Fluoride

ThF4

6.32

--------

Tin Sn

7.30

0.724

Titanium Ti

4.50

0.628

Titanium (IV) Oxide

TiO2

4.26

0.400

Titanium Oxide

TiO

4.90

--------

Tungsten W

19.3

0.163

Thallium through
Zirconium Oxide

Tungsten Carbide

WC

15.6

0.151

Uranium U

18.7

0.238

Vanadium V

5.96

0.530

Ytterbium Yb

6.98

1.130

Yttrium Y

4.34

0.835

Yttrium Oxide

Y2O3

5.01

--------

Zinc Zn

7.04

0.514

Zinc Oxide

ZnO

5.61

0.556

Zinc Selenide

ZnSe

5.26

0.722

Zinc Sulfide

ZnS

4.09

0.775

Zirconium Zr

6.51

0.600

Zirconium Oxide

ZrO2

5.6

--------

Table 7.1: Material Reference Table.