INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 288)

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STC-2000A DEPOSITION CONTROLLER
y
options overview ..........................................37
overview .....................................25, 26, 27, 40
parameter copy form...................................289
physical location...........................................39
process accounting
REMOTE................................................118
programming dependencies..........................20
quick index description...............................280
remote inputs on I/O program table............160
specs .............................................................15
status on options/info screen.......................119
system config values,I/O slot type................17
use in I/O program........................................52
use with factory installed I/O program .......152
used for power SOAK hold ..........................76
used with I/O programming........................154
Input card [note
source sensor card inputs are not I/O
programming inputs] ................................26
Input statement
I/O programming overview ..........................47
M
Manual key
description ....................................................61
O
Output card
connection hazards .....................................269
host port communications, status commands
................................................................239
parameter copy form...................................289
physical location...........................................39
programming dependencies..........................20
quick index description...............................281
relay connections & functions ....................151
status on options/info screen.......................119
P
PID
control quality, setpoint, deviation, L/Q key
................................................................115
copy FILM parameter list ...........................287
deposition source control loop descriptions104
host port communications...........................207
on FILM parameter list.................................16
on FILM parameter list after purge ..............44
overview ...........................................23, 24, 31
overview, pseudo co-dp................................31
parameter descriptions..................................77
specs .............................................................15
R
RAMP
copy FILM parameter list ...........................287
FILM parameter dependency list..................19
host communications, event codes............. 234
host communications, manual power......... 233
host communications, phase status ............ 226
host port communications.................. 205, 211
I/O program table....................................... 160
I/O programming ....................................... 187
manual control while setting PID .............. 105
on FILM parameter list................................ 16
on FILM parameter list after purge.............. 44
overview .......................................... 31, 41, 42
power ramp time.......................................... 76
quick index desc. ....................................... 278
rate ramp mode ............................................ 70
run cycle phase .......................................... 106
RunTime
data
host port communications...................... 216
mode
manual key description ............................ 61
overview ............................................ 40, 41
overview, I/O programming intro ............ 46
purge/factory differences ....................... 121
zero key description................................. 61
screen
description ......................................... 53, 54
detailed description.................................. 63
FILM/MAP description ........................... 73
forcing a crystal switch from ................. 114
graphics area descriptions........................ 81
host port communications, graphics ...... 211
host port communications, graphics area210
in manual mode ....................................... 56
in TEST mode........................................ 127
L/Q description ...................................... 115
manual mode description ....................... 103
menu navigation summaries from.......... 135
menu tree description, navigationfrom .... 61
non-sequencing mode .............................. 74
non-sequencing mode differences ........... 98
overview .................................................. 40
overview, power related screen parameter
dependencies........................................ 43
overview, power related screen parameters
............................................................. 42
overview, screen after purge.................... 44
parameter dependencies........................... 20
parameters................................................ 17
parameters not updated ............................ 25
screens preceeding ................................. 120
set active PROCESS ................................ 97
software controlled keys on ................... 101
START key description ........................... 59
START key flowchart............................ 134
states of (I/O programming) .................. 159
typical runtime screen.............................. 55
SECTION 11.XX page 288 of 292