INFICON STC-2000A Thin Film Deposition Controller Operating Manual - Manual (Page 239)

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STC-2000A DEPOSITION CONTROLLER
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Usefull for establishing timebase in I/O or host interfaces.
42 BOJDPOS Begin of deposit cycle, film being processed has begun the
deposit/rate-ramp/deposit-2/manual phase area, after pre-
condition/shutter-delay phases, shutter is open.
43 EOJDPOS End of deposit cycle, film being processed has left the
deposit/rate-ramp/deposit-2/manual phase area for idle-ramp/idle
or stop phases.
44 EOJFILM End of Film event, film being processed has reached an idle or
stopped phase.
45 EOJPROC End of process event, last film in a process sequence has
completed, process is over.
46 STPROC1 Select & Start Process 1, generated via I/O,COMM in sequencing
option unit.
47 STPROC2 Same as STPROC1 except for Process 2.
48 STPROC3 Same as STPROC1 except for Process 3.
49 STPROC4 Same as STPROC1 except for Process 4.
50 STPROC5 Same as STPROC1 except for Process 5.
51 STPROC6 Same as STPROC1 except for Process 6.
52 STPROC7 Same as STPROC1 except for Process 7.
53 STPROC8 Same as STPROC1 except for Process 8.
54 STPROC9 Same as STPROC1 except for Process 9.
55 RRTRIG Rate Ramp Trigger, causes system to enter the rate ramp on an
external request, providing properly program-med.
56 PHANTOM Obsolete, no longer used. Was LIMPX.
57 BOJPROC Begin of job/process, new to STC-2000A
58 BOJFILM Begin of job/film, new to STC-2000A
59 RLSFHLD Release from a film hold condition. Trigger of this event releases
a film FSM to leave film hold and go on to rise/soaks as needed.
60 CILK10 See CILK00.
61 CILK11 See CILK00.
62 CILK12 See CILK00.
63 CILK13 See CILK00.
64 CILK14 See CILK00.
65 CILK15 See CILK00.
66 CILK16 See CILK00.
67 CILK17 See CILK00.
68 CILK18 See CILK00.
69 CILK19 See CILK00.
70 CILK20 See CILK00.
71 CILK21 See CILK00.
72 CILK22 See CILK00.
73 CILK23 See CILK00.
74 CILK24 See CILK00.
75 CILK25 See CILK00.
76 CILK26 See CILK00.
77 CILK27 See CILK00.
78 CILK28 See CILK00.
79 CILK29 See CILK00.
80 RLSSKHLD Release from a soak hold condition. Trigger of this event releases
a film FSM to leave soak hold and go on to rise/soaks as needed.
81 RSYNC_PG
1
Pocket good, gun1.
82 RSYNC_PG
2
Pocket good, gun2.
SECTION 6.XX page 239 of 292