KEYENCE LT-9001 Series - Manual (Page 61)

3
Chapter
Operations
and
Fun
ction
Settings
in
the
Displacement
Mo
de
E LT-9001-IM
3-15
This section describes the basic settings for
displacement measurement.
This section describes the scanning function for
stable measuring.
Scan width/interval
You can see irregularities on a zoomed in surface even
if the measurement target surface looks flat.
Depending on the irregularity, measurement cannot be
done correctly because of insufficient reflective light.
Stable measuring can be realized by making the
laser beam swing (scan) and canceling any points
that do not have enough reflective light.
■ LT-9010 (M)
■ LT-9030 (M)
SCAN
Meauring
unit
Pitch
(Interval : 1, 2, 5, 10 μm)
Measurement target Measurement target
(Width : OFF, 4,120, 250, 500,100 μm)
Scan width
Meauring
unit
Scan width
Measurement target
(Width : OFF, 4,120, 240, 400, 560 μm)
Pitch
(Interval : 1, 2, 4, 8μm)
Basic Settings
Select a combination of scanning width and pitch
from the table shown below.
■ LT-9010 (M)
■ LT-9030 (M)
OFF No scanning
120/2
120/5
120/10
250/2
250/5
250/10 Scan width (Width):120/250/500/1100µm
500/2 Pitch (Interval): 2/5/10 µm
500/5 Select a combination from the above.
500/10
1100/2
1100/5
1100/10
4/1 Fine-scanning: about 4 µm
OFF No scanning
120/2
120/4
120/8
240/2
240/4
240/8 Scan width (Width):120/240/400/560µm
400/2 Pitch (Interval): 2/4/8 µm
400/4 Select a combination from the above.
400/8
560/2
560/4
560/8
4/1 Fine-scanning: about 4 µm