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1 process parameters – INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual

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XTC/3 Operating Manual

4.4.1 Process Parameters

Figure 4-13 XTC/3M Process screen

Figure 4-14 XTC/3S Process screen

PROCESS TO RUN . . . . . . . 1 to 99 (XTC/3M only)

Selects the process to be run. Only processes with layers may be entered.
The default is 1. This function is not available in XTC/3S.

FILM TO RUN . . . . . . . . . . . 1 to 9 (XTC/3S only)

Selects the film to be run. The default is 1. This function is not available in XTC/3M.