INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 135)

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XTC/3 Operating Manual
14
(0x0e)
RW Hold Time MM:SS
(Seconds)
Int 0 99:59
(5999)
15
(0x0f)
Sensor Cannot change if film is
running
Int 1 2
16
(0x10)
Tool Factor 1 % Float
xxx.x 10.0 500.0
17
(0x11)
Tool Factor 2 % (only active if sensor
type = CrystalTwo
Float
xxx.x 10.0 500.0
18
(0x12)
Xtal Stability
Single
Values 1 to 24 are not
allowed
Int 0 9999
19
(0x13)
Xtal Stability Total Values 1 to 24 are not
allowed
Int 0 9999
20
(0x14)
Xtal Quality
Percent
% Int 0 99
21
(0x15)
Xtal Quality
Counts
Int 0 99
22
(0x16)
2 Source Int 1 2
23
(0x17)
2 Crucible Int 0 8
24
(0x18)
Control Gain Å/sec / % Float
xx.xx 00.01 100.0
25
(0x19)
Control Time
Constant
Seconds Float
xxx.x 0.1 100.0
26
(0x1a)
Control Dead
Time
Seconds Float
xxx.x 0.1 100.0
27
(0x1b)
Max Power % Float
xxx.x 0.0 100.0
28
(0x1c)
Density g/cm 3 Float
x.xx
xx.xx
0.50 99.99
Table 5-2 Standard film parameters (continued)
UF
(0x5546)
Command
ID
Name Units / Allowed
Values / Notes
Data
Type /
Format
Low
Limit
High
Limit