INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 134)

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XTC/3 Operating Manual
Table 5-2 Standard film parameters
UF
(0x5546)
Command
ID
Name Units / Allowed
Values / Notes
Data
Type /
Format
Low
Limit
High
Limit
0
(0x00)
Rise Time 1 MM:SS
(Seconds)
Int 0 99:59
(5999)
1
(0x01)
Soak Power 1 % Float
xxx.x 0.0 100.0
2
(0x02)
Soak Time 1 MM:SS
(Seconds)
Int 0 99:59
(5999)
3
(0x03)
Rise Time 2 MM:SS
(Seconds)
Int 0 99:59
(5999)
4
(0x04)
Soak Power 2 % Float
xxx.x 0.0 100.0
5
(0x05)
Soak Time 2 MM:SS
(Seconds)
Int 0 99:59
(5999)
6
(0x06)
Idle Ramp MM:SS
(Seconds)
Int 0 99:59
(5999)
7
(0x07)
Idle Power % Float
xxx.x 0.0 100.0
8
(0x08)
Deposition Rate Å/sec Float
xxx.x 0.000 999.9
9
(0x09)
Final Thickness kÅ Float
x.xxx
xx.xx
xxx.x 0.000 999.9
10
(0x0a)
Thickness Set
Point
kÅ Float
x.xxx
xx.xx
xxx.x 0.000 999.9
11
(0x0b)
New Rate Å/sec Float
xxx.x 0.0 999.9
12
(0x0c)
Rate Ramp Time MM:SS
(Seconds)
Int 0 99:59
(5999)
13
(0x0d)
RateWatcher
Accuracy
% Int 1 99