INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 24)

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XTC/3 Operating Manual
Crystal Stability, Total . . . . . . . . . . . . 0, 25 to 9999 Hz (1 to 24 are excluded)
Crystal Quality Percent. . . . . . . . . . . 0 to 99%
Crystal Quality Counts . . . . . . . . . . . 0 to 99
Source
Source #. . . . . . . . . . . . . . . . . . . . . . 1 or 2
Crucible Selection . . . . . . . . . . . . . . 0 to 8, each source (0=disabled)
Control Gain . . . . . . . . . . . . . . . . . . . 0.01 to 100 Å/s/%Power
Control Time Constant . . . . . . . . . . . 0.1 to 100.0 s
Control Dead Time . . . . . . . . . . . . . . 0.1 to 100.0 s
Maximum Source Power . . . . . . . . . 0.0 to 100%
Density . . . . . . . . . . . . . . . . . . . . . . . 0.50 to 99.99 g/cm
3
Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . 0.100 to 9.999
Option
Time Power . . . . . . . . . . . . . . . . . . . Yes / No
Delay Option . . . . . . . . . . . . . . . . . . None, Shutter, Control, Both
Transfer Sensor . . . . . . . . . . . . . Yes / No
Transfer Tooling . . . . . . . . . . . . . 10.0 to 500.0%
Control Delay Time. . . . . . . . . . . 00:00 to 99:59 min:s
Ion Assisted Deposit . . . . . . . . . . . . Yes / No
Name (XTC/3M only) . . . . . . . . . . . . provision for 15 alpha numerics
1.4.4 Display
Type/Color/Size . . . . . . . . . . . . . . . . TFT LCD, 3.8 in. diagonal
Format . . . . . . . . . . . . . . . . . . . . . . . Quarter VGA
Resolution . . . . . . . . . . . . . . . . . . . . 320 H x 240 V
Thickness Display Range. . . . . . . . . 0.000 to 999.9 kÅ
Thickness Display Resolution . . . . . 1 Å for 0 to 9.999 kЕ
10 Е for 10.00 to 99.99 kЕ
100 Е for 100.0 to 999.9 kÅ
1 kÅ for 1000 kÅ to 9999 kÅ
Rate Display Range . . . . . . . . . . . . . 0.0 to 99.9 Å/s; 100 to 999 Å/s
Rate Display Resolution. . . . . . . . . . 0.1 Å for 0 to 99.9 Å/s
1 Å for 100 to 999 Å/s