INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
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XTC/3 Operating Manual
A graphical representation of rate deviation or the power over time will also be
displayed. The graph display can be modified by placing the cursor on the Y-axis
graph label and pressing TOGL to toggle between rate deviation and power. The
rate deviation scale can also be toggled between 5,10, 20 and 40 Å/s when the
cursor is placed on the graph Y-axis value.
System messages and errors are displayed on all screens except I/O Map.
NOTE: On XTC/3M, if there are no Process or Film names—they are replaced
by the Process and/or Film number.
Figure 3-4 XTC/3M operate display
Figure 3-5 XTC/3S operate display
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