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INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual

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XTC/3 Operating Manual

Shutter Delay Fail
(M only)

Shutter delay is enabled and the
rate deviation is greater than 5%
or 0.5 Å

of the desired rate for 60

seconds

When Start or Reset is done
If Stop on alarms is set to No, the unit
will give the error but will not do
anything else. It stays in Shutter
Delay and controls power to acquire
correct rate. If rate comes into
specified range, then the output is
cleared.
When Idle Ramp is entered

Computer Contl
(M only)

Set in remote commands

Cleared through remote commands

Cruc Src 1 Bin
Cruc Src 1 BCD
(M only)
Cruc Src 2 Bin
Cruc Src 2 BCD
(M only)

When a Start is done
Output set and cleared to select
crucibles as binary (1 of 8) or
BCD

When a Start is done
Output set and cleared to select
crucibles as binary (1 of 8) or BCD

Table 3-3 Inputs

Input Function

Description

Start

Detection of a falling edge effects a START if a layer is not already
running.

Stop

Detection of a falling edge effects a STOP

End Deposit

Detection of a falling edge terminates the Deposit state just as if the
Final Thickness were achieved.

RW Sample Init

Detection of a falling edge initiates a RateWatcher sample if the film is
programmed for this feature.

RW Sample Inhib

Application of a ground reference voltage maintains the RateWatcher
in the Hold condition.

XtalFail Inhibit

Application of a ground reference voltage prohibits the closure of the
Crystal Fail Relay and the associated Stop.

Zero Thick

Detection of a falling edge duplicates the front panel ZERO.

Soak 2 Hold

Application of a ground reference voltage extends the SOAK 2 state
until the signal/closure is removed.

Cruc 1 Valid
(in XTC/3S, also
used for Source 2)

Application of a ground reference voltage from the crucible rotation
mechanism is used to signal that the proper crucible for Source 1 (or
2 in XTC/3S) has indexed into position and state sequencing may
proceed.

Table 3-2 Output states (continued)

Output

Active

Inactive