3 recovering from stop, 6 special features, 1 automating a process – INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
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XTC/3 Operating Manual
A CRYSTAL FAIL detected during the DEPOSIT state if the Time Power
parameter (Option sub-screen of the Film Parameter display ) is set to No
(when crystal switching is not available).
Following the POST-DEPOSIT states of a layer when the DEPOSIT state
completes in TIME POWER.
Any of the ALARM conditions listed in
above if the Stop on
Alarms or Stop on Max Power configuration is activated (Process sub-screen
of General Parameter display).
3.5.1.3 Recovering from STOP
An interrupted process can be completed (recovered) from a STOP without
manually reprogramming any film or process parameters. Recovery from a STOP
(generated by an operator or any machine induced condition) requires only that the
START command be given. If the STOP was generated by a machine induced
condition such as a crystal fail, that condition must be corrected before the START
command will be accepted. The film in process at the time of the STOP will again
be executed from the beginning, but the displayed thickness will not be zeroed
upon reentry of the DEPOSIT state. Instead, the thickness accumulated at the time
of the generation of the STOP is used. Thickness will accumulate in the normal
fashion from that point. All processing occurs in the normal fashion from reentry of
the DEPOSIT state, forward.
If it is not possible to recover as described above, the process may be reset to the
beginning of layer one by issuing a RESET command prior to a START command.
The RESET command may be given by pressing RESET, through the I/O or
through the remote communications.
3.6 Special Features
3.6.1 Automating a Process
A process can be automated so that a complete process can be executed without
having to press START between all the layers. A process can be automated by any
of the following three methods:
Autostart Next Layer (XTC/3M only): In the Process sub-screen of the
General Parameter display, set this option to Yes by pressing TOGL.
Remote communication control: An external computer could be set up to
monitor the status of a process and issue START commands at desired times.
(See Chapter 5,
.)
Remote input line. A remote input line can be activated to generate a START
command. (See